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SERVOPRO NanoTrace DF-760E ULTRA Product Brochure

SERVOPRO NanoTrace DF-760E ULTRA Product Brochure
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SERVOPRO NanoTrace DF-760E ULTRA Product Brochure - 1

Product overview Ultra High Purity From our ground-breaking ULTRA series, a unique dual measurement trace/ultra trace moisture/ oxygen analyzer for UHP bulk gas analysis Unrivalled performance SENSING TECHNOLOGY Laser Moisture Uses industry-leading, high stability Tunable Diode Laser Absorption Spectroscopy (TDLAS) sensing technology 55ppt LDL (H2O) / 45ppt LDL (O2) Servomex has 70 years’ experience pioneering gas analysis with thousands of this product line in the field Flexible Analysis resistant to gas cell contamination: DF-760E ULTRA operates to specification with up to 90% signal loss NanoTrace SERIES Storage and recall function: calibration, system error and measurement data facilitates archiving operational history Broad Detection Range: 0-20ppm – 0-2ppb min (H2O) / 0-20ppm – 0-1ppb min (O2) Easy to use Dual analysis capability provides ‘one-box’ solution for H2O / O2 trace contaminant measurements A single analyzer can be used for multiple background gases: N2, H2, He, Ar and O2 Low cost of ownership Resilient TDLAS and non- depleting Coulometric sensing requires minimal ongoing maintenance Negligible sensor drift greatly extends calibration intervals Benchmark compliance IEC 61010-1 Overvoltage Category II, Pollution Degree 2 EU EMC Directive EU Low Voltage Directive Class 1 laser product Key applications Ultra high purity bulk gas quality control checks for small line width semiconductor fabs Process line leak detection within semiconductor carts For more information visit servomex.com/

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SERVOPRO NanoTrace DF-760E ULTRA Product Brochure - 2

NanoTrace DF-760E ULTRA High stability TDL trace/ultra-trace measurements Ultra-trace qualification of UHP electronic gases is essential for semiconductor fabrication. You need a moisture analyzer that can deliver highly accurate measurements sensitive to perturbations, but limits production-disrupting false positives. The lowest LDL is a must, and with our dynamic pressure Herriott Cell your LDL stays the same no matter what background gas you choose, so make sure to check the LDL for all the gases of our competition, as their LDL claims will not be consistent. A no compromise solution The...

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SERVOPRO NanoTrace DF-760E ULTRA Product Brochure - 3

Technical data sheet SERVOPRO NanoTrace DF-760E ULTRA Tunable Diode Laser Absorption Spectroscopy (TDLAS) and Coulometric Tunable laser diode (TDL) Measurement range Lower detection limit ±3% of reading / ±0.2ppb (whichever is greater) ±3% of reading / ±0.1ppb (whichever is greater) Gas Background gases Technology Intrinsic error (accuracy) FS Response time (T90) Zero drift/month Smallest recommended output range <5 minutes to return to within 10ppb of previous stable reading Upset recovery time Signal outputs/inputs Analog output 4 output options available for both O2 and H2O Isolated...

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SERVOPRO NanoTrace DF-760E ULTRA Product Brochure - 4

Operating environment Temperature Relative humidity Operating altitude range Storage: Less than +50ºC (122°F) Physical Size Aspirator vacuum source Aspirator with 1/4” compression inlet and outlet fittings 19” rack mount NEMA 1 enclosure Sensor storage conditions We recommend that the analyzer be operated as intended within 6 months of delivery Utilities Supply voltage Standard aspirator gas supply (gauge) N2 or CDA at 80psig (+/- 3psig), 15 l/min with a back-pressure on outlet stream of <2psig Options Configuration options Power input 110 VAC input power 220 VAC input power Hydrogen safety...

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SERVOPRO NanoTrace DF-760E ULTRA Product Brochure - 5

This product complies with the EU EMC Directive, the EU Low Voltage Directive, Overvoltage Category II, Pollution Degree 2 and all other applicable directives. This is a class 1 laser product. Electrical safety Sample wetted materials Analyzer fitted with Stainless steel G10 Epoxy Polypropylene PCTFE Dimensional drawings Dimensions shown in millimetres [inches]

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SERVOPRO NanoTrace DF-760E ULTRA Product Brochure - 6

We’re ready to help Whatever your gas analysis requirements, wherever you are. These analyzers are not intended for any form of use on humans and are not medical devices as described in the Medical Devices legislation or regulation. Please note: Whilst every effort has been made to ensure accuracy, no responsibility can be accepted for errors and omissions. Data may change, as well as legislation, and you are strongly advised to obtain copies of the most recently issued regulations, standards and guidelines. This document is not intended to form the basis of a contract. Servomex has a...

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