x-axis nanopositioning stage PX 100
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x-axis nanopositioning stage PX 100 - 1

PX 100 compact 1-axis translation stage Concept: The systems of the series PX 100 are ideally suited for nm-precise positioning of optic components such as mirrors and laser diodes, adjustment and mounting in semiconductor technologies and electronics, and applications in measurement technologies and quality assurance as well as microbiology. The series PX consist of piezo electrical actuator in stage design with a solid top and bottom plate for easily integration in optical setups. The monolithic flexure hinges design offers high precision motion range, high stiffness and in due of this excellent dynamical performance for extremely fast and accurate positioning tasks Specials: The systems of this series are available in vacuum and cryogenic temperature configurations. As an option they may come equipped with strain gage or capacitive position sensors, depending on the system configuration, to achieve very accurate repeatability in the low nanometer range. Interfaces: The elements of the series PX are actuators integrated with an inner lever transmission in housing. Since the lever mechanism works in both directions, pulling forces between bottom and top plate need to be avoided, as they could damage the stage. The stage is fixed to a base plate. Components can be mounted on the top plate by two threaded diagonal holes and can be accurately affixed using the precise pin holes. Product highlights: accurate parallel motion up to 100µm motion range without mechanical play easily combined with other piezo electrical systems precison pin holes for accurate adjustment high dynamic range Applications: fiber positioning beam alignment semiconductor micro manipulation

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x-axis nanopositioning stage PX 100 - 2

PX 100 Technical data: linear positioning stage resolution (open/closed loop)*** integrated measurement system strain gage resonant frequency (unloaded) voltage range connector (additional variation please see table below) **** cable length min. bend radius of cable temperature range dimensions (LxWxH) aluminum/stainless steel typical value measured with NV 40/3 amplifier (closed loop: NV 40/3 CLE amplifier ) typical value for small electrical field strength the resolution is only limited by the noise of the power amplifier and metrology additional connector configurations Product name PX...

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