Catálogos >
Pfeiffer Vacuum+Fab Solutions >
Gas analysis system HiCube RGA

Gas analysis system HiCube RGA
1 / 8Páginas

Excertos do catálogo

HiCube™ RGA The simple and flexible solution for gas anaysis

The simple and flexible solution for gas anaysis All in one The new HiCube RGA pumping station offers you a simple, straightforward solution for your gas analysis needs. It is suitable for mobile applications, and offers high resolution and sensitivity. The combination of the PrismaPro in the mass range suitable for you and a oil-free HiCube turbopumping station offers you a measurement and analysis unit for a wide range of applications that features optimally integrated high-tech components. Integrated safety The integrated gas dosing/shut-off valve allows you to vary the inlet pressure...

Abrir o catálogo na página 2

Residual gas analysis and helium leak detection mode Can be used from atmospheric pressure to high vacuum High resolution and sensitivity Filament protected by pressure monitoring Gas inlet system with integrated shut-off

Abrir o catálogo na página 3

Typical applications Residual gas analysis Analysis of the residual gas in a vacuum system provides insight into the composition of the remaining substances upon reaching the desired ultimate pressure or conditioning requirements. This enables conclusions to be drawn about the surface properties, desorption behavior, purity and leak-tightness of the system, as well as the composition of the process gas. That provides the user with important information about the condition of the vacuum chamber and/or the vacuum components. Full scan of a residual gas spectrum in the range from 0 to 100 u....

Abrir o catálogo na página 4

Process monitoring The HiCube RGA enables any number of selected mass intensities to be observed over time within a measurement range of up to 300 u1). Alarm cycling thresholds can be assigned to selected masses. If they are higher or lower than the desired limits, signals may be given to a higher level control system via digital outputs. This allows the HiCube RGA to provide realtime process observation and control. The EVN 116 gas dosing valve additionally allows the pressure in the vacuum system to be adapted to suit the needs of the process in question, and an additionally integrated...

Abrir o catálogo na página 5

Technical data, dimensons and order numbers Technical data Turbo pumpingstation HiCube™ Eco Power consumption Voltage (range) Pumping speed for N2 Pumping speed of backing pump at 50 Hz Ultimate pressure Pressure gauge PKR 361 active Pirani/cold cathode transmitter Measurement range from 1 ■ 10-9 to 1 ■ 103 hPa Operating temperature, analyzer 200 °C (max. 150 °C when operating with SEM) Operating temperature, electronics Bakeout temperature, analyzer Connection flange Resolution at 10 % peak height Dwell time Reproducibility of peak ratio Supply voltage 1) Including digital position...

Abrir o catálogo na página 6

1 Only for QMG 250 M, not applicable to QMG 250 F Value in brackets applies to QMG 250 F Order numbers

Abrir o catálogo na página 7

VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio. COMPETENCE IN THEORY AND PRACTICE Benefit from our know-how and our portfolio of training opportunities! We support you with your plant layout and provide first-class on-site service worldwide. Are you looking for a Pfeiffer Vacuum GmbH perfect vacuum...

Abrir o catálogo na página 8