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ACCUMEASURE CAPACITANCE PROBES - FOR DIGITAL ACCUMEASURE AMPLIFIER

ACCUMEASURE CAPACITANCE PROBES - FOR DIGITAL ACCUMEASURE AMPLIFIER
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ACCUMEASURE CAPACITANCE PROBES - FOR DIGITAL ACCUMEASURE AMPLIFIER - 1

A worldwide leader in precision measurement solutions True Direct Digital Capacitive Displacement Sensor Up to 0.01% FSR Linearity Sub-nanometer Resolution Standard and Custom Capacitance Probes Available

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ACCUMEASURE CAPACITANCE PROBES - FOR DIGITAL ACCUMEASURE AMPLIFIER - 2

Advanced Features Highest resolution in the industry with 0.01% linearity No need for analog-to-digital converter Connect via LAN or USB - automation friendly High speed up to 20kS/sec. on all channels Digital range extension. One probe - multiple ranges Software logs data directly to .csv file Flexible filters and averaging control via software TM Interface with NI LabVIEW The chart above shows the Accumeasure D100 measuring 200nm steps of a piezo stage with an ASP-125M probe with x1 extension range. True Digital Design The Accumeasure D series amplifier is a true revolutionary design that...

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ACCUMEASURE CAPACITANCE PROBES - FOR DIGITAL ACCUMEASURE AMPLIFIER - 3

USB Ensures Lowest Latency for closed-loop control Ethernet utilizes common networking equipment to build distributed systems Multiple Unit Synchronization synchronizes several units together for multiple point measurement, such as sheet metal thickness, semiconductor measurements, etc. Single Power Supply uses inexpensive industry standard 24VDC Included Software MTI Basic Software Easy user interface allows exporting data to image files or Excel® CSV files or data logging for data analysis and reports The user settings tab allows adjustment of range, averaging, filter, data rate and other...

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ACCUMEASURE CAPACITANCE PROBES - FOR DIGITAL ACCUMEASURE AMPLIFIER - 4

Probe Specifications Cable and Probe Temperature Rating: Cryogenic and higher temperature probes are available up to 1200°C - consult MTI Factory. A BNC to SMA adapter is required Connector Temperature Rating: 1 Accuracy : Probe and Cable Interchangeability: Pressure Rating Standard: Material: ±0.01% FSR or better, of range when probe and amplifier are calibrated to a known standard at x1 range extension. Accurate to within ± 0.2% at X1 range extension without recalibration 1400kPa (200 psig) Stainless steel construction, no active internal electronics 2 Cable Length for ILA, ILR and PSR...

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ACCUMEASURE CAPACITANCE PROBES - FOR DIGITAL ACCUMEASURE AMPLIFIER - 5

Guard Ring Measuring Range 25 µm 1 mil Resolution at 50Hz RMS 0.2 nm 0.008 µi Resolution at 5kHz RMS 1.5 nm 0.059 µi PRODUCT CODE PRODUCT CODE PRODUCT CODE Sensing Area Body (ground)

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ACCUMEASURE CAPACITANCE PROBES - FOR DIGITAL ACCUMEASURE AMPLIFIER - 6

PRODUCT CODE Measuring Range 1250 µm 50 mils PRODUCT CODE PRODUCT CODE PRODUCT CODE Measuring Range Body (ground) Guard Ring Mounting Holes Sensing Area PRODUCT CODE PRODUCT NUMBER Range Min. Range Resolution at 10Hz RMS Max Range Extension Resolution at 5kHz RMS E L W T Hole Information µm mils µm mils nm µi nm µi mm Inch mm Inch mm Inch mm Inch

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ACCUMEASURE CAPACITANCE PROBES - FOR DIGITAL ACCUMEASURE AMPLIFIER - 7

Probe Recommended Stand-off Ranges Tips for Quick Ordering Process Select Capacitance Amplifier Model Accumeasure Models three channels four channels Select Probe Style CONNECTOR TYPE RADIAL Connector-type probes require selection of cable assembly upon ordering (see accessories for probe extension cable) INTEGRAL LEAD RADIAL CONNECTOR TYPE AXIAL Connector-type probes require selection of cable assembly upon ordering (see accessories for probe extension cable) INTEGRAL LEAD AXIAL PANCAKE SQUARE RADIAL Select Probe Measurement Range Specify Range Extension Required Use corresponding Product...

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ACCUMEASURE CAPACITANCE PROBES - FOR DIGITAL ACCUMEASURE AMPLIFIER - 8

Specifications Number of Channels Measurement Range Analog-to-Digital Converter Resolution Noise Long Term Stability/Drift Linearity Accuracy Frequency Response Output Data Rate Temperature Stability Filter ADC Bit Count Averaging Basic Interface Digital Output Included Software Accumeasure D100 Accumeasure D200 Accumeasure D300 Accumeasure D400 P/N: 8000-6823-001 P/N: 8000-6823-002 P/N: 8000-6823-003 P/N: 8000-6823-004 one-channel two-channels three-channels four-channels 0 to 12.5mm1 (Range Extension of 1x and 2x standard, up to 10x optional- Contact MTI) 2 24 bit (1 part in 16777216 of...

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