Tru-Flo®
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Flow Measurement & Control MASS FLOW VERIFIER - RoHS COMPLIANT The MKS Tru-Flo® Mass Flow Verifier (MFV) is a fully integrated diagnostic instrument that provides in situ verification of mass flow controller (MFC) performance on semiconductor process tools. The Tru-Flo MFV measures a pressure rate-of-rise into a known volume at a known temperature to determine mass flow to within ±1% of Reading. It consists of a small gas volume, an MKS Baratron® pressure sensor, shut off valves, and control electronics combined into a single compact package. The Tru-Flo can be easily incorporated into a process tool gas panel and communicates with a tool host computer via an RS-232 interface. The Tru-Flo sets a new standard in gas delivery performance. Tool uptime is improved with rapid in situ MFC verification. Unnecessary removal of suspect MFCs is eliminated. Measurement accuracy is enhanced versus conventional techniques resulting in tighter process control. As a result, the Tru-Flo MFV provides almost immediate return on investment. Features & Benefits Higher System Uptime • In situ mass flow verification without MFC removal • Shorter measurement time than any other technique • Faster, more effective troubleshooting Enhanced Process Control • Most accurate flow verification method • Widest flow verification range (up to 5000 sccm) • No risk of contamination due to MFC removal

Tru-Flo® Advantages The Tru-Flo takes MFC verification to new levels of speed and accuracy versus current techniques: 1) Process Chamber Rate-of-Rise • Measurement accuracy strongly influenced by chamber conditions - temperature variations, outgassing, chamber cleanliness variations, and volume changes can lead to errors of several percent • Flow measurement range limited due to chamber volume and pressure sensor limitations • Full gas panel measurement time typically > 1 hour 2) Verification MFC in Gas Panel (“Golden MFC”) • Calibration to a single surrogate gas limits accuracy for other...

Communications and Electronics The Tru-Flo firmware supports the pressure and temperature measurements, operates the pneumatic shut-off valves and controls the following operations: • Verify Flow Rate – The controller reports the gas flow in sccm of actual gas used. • External Volume Calculation – The controller measures the volume in the line between the MFC and the Tru-Flo for use in flow calculations. • Purge – The controller sequences valve to cycle- purge the chamber to minimize the potential of cross contamination. The user can select the minimum and maximum pressure and number of...

Ordering Inf ormation Ordering Code Example: GBR3B53CRR1A10 Type Tru-Flo Mass-Flo Verifier Flow Range 500 5000 Inlet Fitting 4 VCR Male Outlet Fitting 4 VCR Male Valve Position (idle state) Closed Air Inlet Fitting 1/8” tube 4 mm tube Firmware Revision Unless otherwise specified, MKS will ship latest firmware revision Dimensional Drawing — Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Global Headquarters 2 Tech Drive, Suite 201 Andover, MA 01810 Tel: 978.645.5500 Tel: 800.227.8766 (in U.S.A.) Web: www.mksinst.com Tru-Flo_RoHS - 8/12 © 2010 MKS...