Gauge Controller Selection Guide
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Gauge Controller Selection Guide - 1

- 1 - Gauge Controller Selection Guide W W W . M K S I N S T . C O M Vacuum Technology

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Gauge Controller Selection Guide - 2

Multi-Channel Gauge Controllers Series 937A Combination Gauge Controller The Series 937A is a digital combination vacuum gauge system that will operate as many as five sensors simultaneously. Every controller is configured to the user's specifications regarding sensors, line voltage and frequency, units of measure and communication choice. The Series 937A combines the technologies of the cold cathode, standard Pirani, convection Pirani, thermocouple, Baratron capacitance manometer and absolute Piezo sensors to measure from ultra-high vacuum to above atmospheric pressure. Up to five...

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Gauge Controller Selection Guide - 3

Vacuum Gauge Controllers Single Channel Gauge Controllers Series 945 Pirani Gauge Controller The Series 945 Pirani is a single-channel controller designed to be economical and user-friendly while providing fast, reliable pressure measurement. The 945 controller provides a pressure measurement range of 10-4 to 100 Torr and is ideal for rough to medium vacuum applications. Two independent, adjustable set points are standard. The 945 Pirani controller is used in conjunction with the Series 345 Pirani Sensor. The Series 345 Pirani sensor is a robust, dependable sensor with fast and stable...

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Gauge Controller Selection Guide - 4

Series 937A Series 959 Sensors Supported 421 & 423 Cold Cathode; 345 & 317 Pirani; 622, 626 & 722 Baratron; Series 902 Piezo 345 Pirani & 317 Convection Pirani; HPS Nude Tube (Bayard Alpert Hot Cathode); Mini Ion Gauge (Bayard Alpert Hot Cathode) Number of Channels 5 2 Measurement Range 10-11 to 10+4 Torr (dependent on sensor selection) 10-10 to 1,000 Torr (dependent on sensor selection) Set Point Range 2.0 x 10-10 to 9.5 x 10+3 Torr (dependent on sensor selection) 5.0 x 10-10 to 950 Torr (dependent on sensor selection) Operating Temperature 5° to 40° C (41° to 104°F) 5° to 40°C (41° to...

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Gauge Controller Selection Guide - 5

Sensors Specifications Cold Cathode Standard Pirani Convection Pirani Hot Cathode (Bayard Alpert) Capacitance Manometer / Piezo Sensor Models Series 421 Series 423 I-Mag® Series 345 (shielded) Series 317 (shielded) Nude Tube Mini Ion Gauge (MIG) 722 and 626 (Baratron) Series 902 (Piezo) Compatible Controllers Series 937A Series 943 Series 937A Series 959 Series 945 Series 937A Series 959 Series 947 Series 959 Series 937A Measurement Range 1.0x10-11 to 1.0x10-2 Torr 5.0x10-4 Torr to ATM 1.0x10-3 to 1.0x10+3 Torr 1.0x10-10 to 1.0x10-2 Torr Three decades of measurement below full scale Set...

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Gauge Controller Selection Guide - 7

Controllers Series 959 Controllers 109590015 Series 959 Controller, Torr, 50 Hz, Hot Cathode Only 109590016 Series 959 Controller, Torr, 60 Hz, Hot Cathode Only 109590025 Series 959 Controller, mbar, 50 Hz, Hot Cathode Only 109590026 Series 959 Controller, mbar, 60 Hz, Hot Cathode Only 109590035 Series 959 Controller, Pascal, 50 Hz, Hot Cathode Only 109590036 Series 959 Controller, Pascal, 60 Hz, Hot Cathode Only 109590915 Series 959 Controller, Torr, 50 Hz, Hot Cathode/Pirani 109590916 Series 959 Controller, Torr, 60 Hz, Hot Cathode/Pirani 109590925 Series 959 Controller, mbar, 50 Hz, Hot...

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Gauge Controller Selection Guide - 8

Bulletin 06/07 - Gauge Controller Selection Guide © 2007 MKS Instruments All rights reserved MKS Global Headquarters 90 Industrial Way Wilmington, MA 01887 Tel: (978) 284.4000 Tel: (800) 227.8766 (in USA) Web: www.mksinst.com Email: mks@mksinst.com MKS Vacuum Technology HPS® Products 5330 Sterling Drive Boulder, CO 80301 Tel: (303) 449.9861 Tel: (800) 345.1967 (in USA) 1 VCR-compatible parts may be used. Due to continuous development, specifications and prices are subject to change without notice. HPS® and I-Mag® are registered trademarks and DualTrans™, MicroPirani™ and Quattro™ are...

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