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Ozone Systems SEMOZON® AX8407 HIGH CONCENTRATION, HIGH FLOW OZONE GENERATOR Ozone is an environmentally friendly alternative to many chemical processes. It has a high redox potential, can be generated at the point of use and is easily converted back to oxygen. Typical semiconductor ozone applications include TEOS/Ozone CVD, Ta2O5 CVD, photoresist strip, wafer cleaning, contaminant removal, surface conditioning, oxide growth, and ALD. Ozone is also ideally suited for use in pharmaceutical and water processing applications including cleaning, sterilization and disinfection, as well as Clean-In-Place (CIP). The SEMOZON AX8407 generator converts pure oxygen into ozone through silent electrical discharge and achieves high output and high concentration level. It requires only minute levels of dopant nitrogen gas, far below the levels required for competitive ozone generators. As a result, the presence of contaminants, e.g. NOx compounds, is extremely low. Features & Benefits High Ozone Concentration and Flow • Ozone concentration up to 335 g/Nm3 or 21.7 wt% at 5°C • O2 flow rate from 5 slm to 40 slm enables process flexibility • Patented cell structure design enables production of high concentration ozone • Closed-loop operation for tighter process control Clean, Saf Alternative to e Conventional Chemical Processing • • • High redox potential Can be generated at the point of use Green chemical, easily converted back to oxygen Low Cost of Ownership • No consumables • No chemical disposal costs Designed f Reliability and or Compliance • Reliability tested to >100,000 hours • CE, UL/CSA and F47 compliant

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Specifications and Ordering Inf ormation Model AX8407 Maximum Ozone Output with 17°C Cooling Water 305 g/Nm3 (19.6 wt%) Maximum Ozone Output with 5°C Cooling Water 335 g/Nm3 (21.7 wt%) O2 Flow Range 5 - 40 slm Operating Range Ambient Temperature - 40°C (50 - 104°F) 10 Nominal Cell Pressure (Delivery) 15 - 45 psig (100 - 310 kPa) Pressure Maintain process pressure at 20 - 30 psig Control Interface Front panel control and remote operation Feed Gas Oxygen O2 Grade 6 or better Nitrogen Grade 5 or better N2 100-1000 ppm Cooling Water Temperature - 77°F) 5 - 25°C (41 Filtration 100 microns...

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