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Temperature Control Unit Datasheet

Temperature Control Unit Datasheet
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?Magnetically driven coolant pump for leak free,reliable operation?Wide operating temperature of -40to +80аC?Temperature set at 0.1C increments?Typical stability +/- 1аC?Adjustable coolant flow rate 1-6 gpm?SEMI S2-93 qualified & CE marked?Perfluorocarbon coolant for ion free operation?Remote temperature sensing capability?Stainless steel pressurized coolant system?MTBF of 50,000+ hours?Refrigerant & coolant lines are helium leak checked?BOC Edwards worldwide service support >

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APPLICATIONS The TCU 40/80 Plus Temperature Control Unit is a single channel chiller which supplies perfluorocarbon coolant in a closed loopfor temperature control of semiconductor process chambers and wafers during etch and other processes.It is designed for relia- bility,up-time performance,and ease of maintenance,providing continuous and trouble free cooling across a wide temperature range.The TCU 40/80 Plus is ideal for cooling electrostatic chucks,quartz windows,chamber domes and walls.The TCU 40/80 Plus is designed to meet the stringent demands of the semiconductor industry.It is a...

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PRODUCTSPECIFICATIONSDIMENSIONS Dimensions:22"W x 30"D x 30"H (35"H with casters)(559mm x 762mm x 762mm)Weight:416 lbs (178 kg) House water requirements:3-6 gpmTemperature range +10C to +26аC Pressure 20 to 100psi maximumHouse water connections:1/2" brass compression fitting and 1/2" brass hose barb adapters,suppliedCoolant fluid connections:1/2" Swagelok > 96.52993.14 40/80 Plus union connector,suppliedElectrical power requirements:200 - 208V,3 phase 50/60 Hz30 Amp fused outlet (NEMA L21-30R) > Front View Side View 559 762 required Phase rotation:Phase rotation motor built-in Electrical...

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PRODUCTDESCRIPTIONORDERINGNUMBER ? TCU 40/80 Plus* (includes instruction manual,all connecting fittings,W951-00-000shut off valves,secondary containment receptacle and funnel) SPAREPARTS ORDERINGNUMBER ? Instruction Manual:(Available in English,French,German,Italian,and Japanese)W959-00-001 ? Preventative maintenance kitP601-53-005 ? FunnelP601-41-100 ? Secondary containment receptacleP301-52-700 ACCESSORIES ORDERINGNUMBER ? Perfluorocarbon Coolant - 3M FC-77 (44 lb/20 kg)P350-01-800 - 3M FC-77 (14 lb/6.35 kg)P350-01-700 - 3M HFE 7500 (12 lbs/5.44 kg)P352-89-600 - 3M HFE 7500 (40 lbs/18.14...

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