TETRA
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Plasma Systems For Production And Research Diener electronic GmbH + Co. KG

Tetra 30/50 Technical Data Standard: Tetra-30-LF / Tetra-50-LF 1. Dimensions of cabinet (19“ Rack): without connections: Tetra-30: approx. W 600mm x H 1800 mm x D 800 mm Tetra-50: approx. W 600mm x H 1800 mm x D 800 mm Weight: approx. 250 kg (without pump) 2. Dimensions of vacuum chamber: Tetra-30: approx. W 305 mm x H 300 mm x D 370 mm Tetra-50: approx. W 305 mm x H 300 mm x D 625 mm Chamber volume: approx. 33 l / 57 l 3. Gas connections: 2 gas channels through needle valve 4. Plasma generator: 40 kHz / 0 – 1.000 W, innitely variable 5. Electrodes and goods-carriers: The machine can be...

Technical Data Standard: Tetra-30-LF-PC / Tetra-50-LF-PC 1. Dimensions of cabinet (19“ Rack): Tetra-30: approx. W 600mm x H 1800 mm x D 800 mm Tetra-50: approx. W 600mm x H 1800 mm x D 800 mm Weight: approx. 250 kg (without pump) 2. Dimensions of vacuum chamber: Tetra-30: approx. W 305 mm x H 300 mm x D 370 mm Tetra-50: approx. W 305 mm x H 300 mm x D 625 mm Chamber volume: approx. 33 l / 57 l 3. Gas connections: 2 gas channels through mass ow controller 4. Plasma generator: 40 kHz / 0 – 1.000 W, innitely variable 5. Electrodes and goods-carriers: The machine can be equipped with one to...

Diener electronic GmbH + Co. KG

Tetra 100/150 Technical Data Standard: Tetra 100 LF / Tetra 150 LF 1. Dimensions of cabinet (19“ Rack): without connections: Tetra-100: approx. W 1000 mm x H 1800 mm x D 1000 mm Tetra-150: approx. W 1000 mm x H 2400 mm x D 1000 mm Weight: approx. 300 kg (without pump) 2. Dimensions of vacuum chamber: Tetra-100: approx. W 400 mm x H 400 mm x D 625 mm Tetra-150: approx. W 400 mm x H 600 mm x D 625 mm Chamber volume: approx. 100 l / 150 l 3. Gas connections: 2 gas channels through needle valve 4. Plasma generator: 40 kHz / 0 – 2.500 W, innitely variable 5. Electrodes and trays: The machine can...

Technical Data Standard: Tetra 100 LF PC / Tetra 150 LF PC 1. Dimensions of cabinet (19“ Rack): Tetra-100: approx. W 1000 mm x H 1800 mm x D 1000 mm Tetra-150: approx. W 1000 mm x H 2200 mm x D 1000 mm Weight: approx. 300 kg (without pump) 2. Dimensions of vacuum chamber: Tetra-100: approx. W 400 mm x H 400 mm x D 625 mm Tetra-150: approx. W 400 mm x H 600 mm x D 625 mm Chamber volume: approx. 100 l / 150 l 3. Gas connections: 2 gas channels through mass ow controller 4. Plasma generator: 40 kHz / 0 – 2.500 W, innitely variable 5. Electrodes and trays: The machine can be equipped with one...

The Fully Automatic Control: The fully automatic control was conceived for continuously running processes with only a few parameter changes. In contrast to the PC variant gas flow, pressure and power are only steered and not elec- tronically regulated. button, the plasma process runs fully automatic: Plasma process There is also the possibility of starting and of terminating each manually. For this the buttons The PC-control was developed by us, for applications with frequent changes of pa- rameters and a high requirement to the process regulation and the process docu- Simple operation...

Available options: 13.56 MHz generator 2.45 GHz generator intake lter for vacuum pump carbon exhaust lter automatic door barcode reader bias voltage measurement buttery valves rotary drum (bulk goods, powder) pressure-reducing valve spare parts set faraday box gas shower heating plate ion measuring sensor corrosive gas version monomer bottle network connection PC-control polymerization accessories RIE electrode safety valve software (also customized) special anges temperature sensors test inks vacuum pump systems device for powder treatment trays (also customized) service contract...

Applications Applications • degreasing / cleaning • photoresist ashing • powder treatment • pre-treatment before printing • pre-treatment before bonding • pre-treatment before painting • pre-treatment before soldering • pre-treatment before molding • pre-treatment before casting • pre-treatment before gluing • Automotive industry • Elastomer technology • Electron microscopy • Precision mechanics technology • Semiconductor technology • Small-batch manufacturing • Plastic industry • Medical devices manufacturing • Micro system technology • Solar cell technology • Textile technology •...