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DIVERSIFIED Diversified Karman Vortex Flow Sensor FLUEREX WFK2 SERIES Received the 2018 Good Design Award Model variations Port size Flow rate range (L/min) 0 Manual valve integrated Cock
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Supports fluorine liquids Supports fluorine liquids with excellent electrical insulation. Ideal for controlling coolant in semiconductor manufacturing equipment. Fluids with low global warming potential are also supported. Compatible with flow rates of 0.4 to 250 L/min Easy flow rate adjustment (Option) Compatible with a wide range of flow rates. Needle: Fine adjustment is possible with the manual valve. Cock: Valve can be easily opened and closed. All models equipped as standard with fluid temperature measuring function Saves space and wiring time with no need for a separately installed...
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Easy to read 2-screen color liquid crystal display The temperature, accumulated flow, set value, etc., can be displayed simultaneously. The display color can be selected from white, green, and red. Upper: Instantaneous flow rate Lower: fluid temperature Upper: Instantaneous flow rate (green) Lower: Fluid temperature (red) Upper: Accumulated flow Lower: Instantaneous flow rate Upper: Instantaneous flow rate Lower: OUT1 output set value Display screen rotation The liquid cr ystal display can be rotated 90° at a time without moving the body. There is no interference even when installing in...
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Examples of applications Semiconductor Semicon manufacturing equipment Hardening Induction hardening device Cooling and temperature c ontrol of semiconductor manufacturing equipment. Etching, grinder, dicer, CVD. Quantitative management of coolant. Controls solenoid valve Controls solenoid valve Detects abnormal flow rates Flow rate measurement data Detects abnormalities Controls peripheral components PLC I/O unit Input Output terminal terminal Detects abnormal flow rates PLC I/O unit Input Output terminal terminal Water temperature measurement data Recorder Monitor (flow rate display) Spot...
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