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High purity gas systems
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Intro 5 Model No. Type/Classification Working fluid Connection Cv flow factor Page Model No. Working fluid Supply fluid pressure (MPa) Ultimate vacuum (kPa(abs)) Connection Page Model No. Working fluid Maximum working pressure (MPa) Set pressure range (MPa) Connection Page Process gas valve 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Regulator Other process gas valves Manual valve Air operated valve · Air operated valve · Metal diaphragm structure · 22.5 compact type AGD01 2V · Air operated valve · Metal diaphragm structure · Standard size AGD11 2V/AGD21 2V *Contact CKD for details on other joints such as 1/8-inch JXR. Parts compatible with other variations · Manual valve · Metal diaphragm structure · Handle open/close (90° snap action) OGD1 20V · Manual valve · Metal diaphragm structure · Handle open/close (270° rotation) MGD1 20V Parts compatible with other variations · Vacuum generator for process gas exhaust · Diaphragm type extremely small flow rate adjustment valve · Piston structure check valve VG PGM Pneumatic operated 2-port valve Normally closed Normally open Inert gas Process gas 1/4" JXR male joint 1/4" JXR female joint Refer to the indicated page for details. Refer to the indicated page for details. 1/4" JXR male joint 1/4" JXR female joint 1/4" double barbed joint 3/8" JXR male joint 3/8" JXR female joint 3/8" double barbed joint Manual 2 port valve Inert gas Process gas Inert gas Process gas 0.4 to 0.6 -0.07 to 0.21MPa (pressure range 30V) 0 to 0.21MPa (pressure range 30) 0 to 0.35MPa (pressure range 50) 0 to 0.42MPa (pressure range 60) 0 to 0.7MPa (pressure range 100) 1/4" JXR male joint 1/4" JXR female joint 1/4" double barbed joint 3/8" JXR male joint 3/8" JXR female joint 3/8" double barbed joint IN1/4" JXR male joint VAC.1/4" JXR female joint VENT3/8" JXR male joint Inert gas Process gas 1.0 13.3 or less 1/4" JXR male joint 1/4" JXR female joint 1/4" JXR male female joint 1/4" JXR female male joint Various integrated valve interfaces 1/4" JXR male joint 1/4" JXR female joint 1/4" double barbed joint 3/8" JXR male joint 3/8" JXR female joint 3/8" double barbed joint 0.1 0.26 0.6 0.26 0.6 0.26 0.6 0.1 0.26 0.6 0.26 0.6 P.6 P.8 P.10 P.24 P.26 P.28 P.34 P.36 P.42 *The pressure range in parentheses is psi. * High purity gas control systems Selection guide <> *Refer to Intro 7 to 8 in the introduction for the high vacuum component selection guide.

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Intro 6 Model No. Seal connection method Size Cv flow factor Page Model No. Working fluid Working pressure range (MPa) Port size Filtration Page Model No. Working fluid Maximum working pressure (MPa) Set pressure range (MPa) Port size Page Integrated gas supply system Other gas components 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Clean regulator Clean filter Integrated gas supply systems IAGD3 IAGD4 · SEMI F86, F87 (1.125-inch size, C seal) compatible air operated valves and manual valves are also available. (Page 67) FCS500/FCS1000 RC2000 CS seal W seal 1.5 inches Compressed air Nitrogen ·...

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