ZYGO Optical Profiler Accessory Guide
8Pages

Optical Profiler Accessory Guide OMP-0594N Covers NewViewTM 9000 and NexviewTM NX2

Optical Profiler Accessory Guide Standard objectives provide a wide range of magnifications to accommodate almost any part 1.4X ZWF Long Working Distance (LWD) objectives have an extended working distance 1X 6300-0318-01 Glass Compensated (GC) objectives are designed to measure through glass substrates 2X 6401-0115-01 Super Long Working Distance (SLWD) objectives provide 40 mm or more part clearance 1X 6300-0307-01 For complete objective specifications see the Objective Chart that corresponds to your profiler model (Charts available at www.zygo.com). (1) U.S. Patent Number 8,045,175; U.S....

Objective Adapters Optical Profiler Accessory Guide Accessory Single Mount Dovetail Description Single Mount Dovetail Mounts a single objective. The mount features internal M25 threads and a square dovetail. One included with system. Adapter Ring Parfocal Adapter Adapter Ring 3.53 mm parfocal adapter ring for 10X, 20X, and 50X objectives. The ring has internal RMS threads and external M25 threads; and has a diamond-pattern knurl for grip. Add to a RMS threaded objective to make the parfocal distance match the other standard objectives. One included with the objective. 60 mm Parfocal Adapter...

Optical Profiler Accessory Guide Accessory Field Zoom Lens Description 0.5X Zoom Lens; standard with Nexview models 0.75X Zoom Lens 1X Zoom Lens; standard with all models 1.5X Zoom Lens 2X Zoom Lens; standard with Nexview models Discrete lenses provide high quality and flexible imaging. Lenses purchased separately include a protective case and end caps. Calibration Standards The NewView 8200 holds 1 lens; all other profilers hold up to 3 zoom lenses. Accessory Lateral Calibration Standard Description Lateral Calibration Standard Use to determine actual camera pixel-to-pixel spacing for...

Stages, NewView Optical Profiler Accessory Guide Accessory 1-Axis Motorized Z Stage Description 1-Axis Motorized Z Stage Provides a motorized z stage built into the column, which has 100 mm of travel with 0.1 μm resolution. A joystick is used to focus and position the sensor head. The Manual X-Y, Tip-Tilt Part Stage is included with the 1-axis motorized z stage. The manual x-y stage has 100 mm of travel. The manual tip-tilt stage has ±3 deg. of travel. 3-Axis Motorized Z, X-Y, & Manual Tip-Tilt Part Stage 5-Axis Motorized Z, Tip-Tilt, X-Y Part Stage 5-Axis Motorized Encoded Z, & Motorized...

Optical Profiler Accessory Guide Part Number 6308-0119-01 Description Motorized Theta Stage Add-on; Nexview Provides a rotary stage with 360 degree rotation, electronics, and cabling for installation on the Nexview X-Y stage. Mx software supports programmed moves including wafer pre-alignment and free patterns. Wafer Chuck Wafer Chuck; Nexview The chuck accommodates 150/200 mm diameter wafers and has manual rotation. The anodized aluminum surface provides two vacuum positions with user removable pin stops. Mounts on the X-Y stage. Not compatible with Theta Stage 6308-0119-01. Ceramic Vacuum...

Worktable & Stand Optical Profiler Accessory Guide Accessory Worktable Description Worktable Use as a work surface; it holds the Joystick, monitor, keyboard, and mouse. Complements the support stand design and includes a storage drawer. Dimensions: 82 x 73 x 61 cm (HWD). Support Stand Support Stand; NewView Use as a support stand and equipment cabinet. Inside, the stand can store the computer, electronics enclosure, and power strip. It features push to open latches and wheels for easy transport. Dimensions: 67 x 73 x 61 cm (HWD). Sit/Stand Workstation Sit/Stand Workstation A compact sit or...

Optical Profiler Accessory Guide Information subject to change without notice. ZYGO CORPORATION LAUREL BROOK ROAD • MIDDLEFIELD, CT 06455 PHONE: 860 347-8506 • WWW.ZYGO.COM OMP-0594N 08/22