LASE R INTERFERO METE RS Laser Interferometers THE INDUSTRY STANDARD FOR RELIABILITY, FLEXIBILITY AND REPEATABILITY IN PRECISION METROLOGY APLICATIONS

Zygo® is respected globally as an innovator and for providing best-in-class technologies, services, and solutions with a focus on surface metrology, position sensing, and optical components and assemblies. In a world where meeting and achieving precise tolerances are critical to the success of advanced applications, Zygo is your dedicated strategic partner.

Zygo has been at the cutting edge of ultra-precision manufacturing for 50 years. Zygo’s global, industry-wide achieving cutting-edge solutions a result of a dedicated team, passion, experience, tenacity, and the desire to succeed. Zygo’s four core values sit at the heart of all we do. In every way Zygo goes critical specification. Beyond Precision™. Beyond Precision

OPTICAL METROLOGY ZYGO’s laser interferometers and 3D optical profilers measure the broadest range of surface spatial wavelengths in the industry today. Through experience, ZYGO has elevated the application of optical metrology to an enabling technology for our customers. It is non-destructive and fast, with high resolution and low noise, and the versatility to address applications from R&D laboratories to industrial production and dynamic high-vibration environments – qualifying the most stringent tolerances in optical surface form, wavefront error, thickness variation, and other critical requirements....

Our laser interferometers move beyond the quality lab. Confidence in Metrology “Our team at Nikon Optical Modules and Products are in favor of the capability of ZYGO interferometers to precisely measure surface form and refractive index uniformity of our high-quality optical materials and components. With ZYGO and our expertise, we maintain credibility with our customers, qualify our products to meet their requirements and deliver the best possible quality to the industry.” Ms. Akiko Yoshida, NIKON CORPORATION

Zygo Laser Fizeau interferometers provide sub-nanometer measurement precision with non-contact sensing, fast and precise measurements over a large aperture of optical surfaces and system wavefronts. Our broad range of interferometer products are used in industries including semiconductor, consumer electronics, defense, aerospace, medical, research, and much more. MECHANICAL PHASE SHIFTER BEAM SPLITTER REFERENCE OBJECT LASER INTERFEROMETER A laser source is expanded and collimated, then split between a reference beam and a test beam. The surface of interest is aligned to reflect the test beam...

Zygo innovation in action — acquisition technology enables reliable data in harsh environments. PHASE SHIFTING INTERFEROMETRY DYNAMIC INTERFEROMETRY QPSI TECHNOLOGY High Vibration Low Vibration VIBRATION SPECTRUM QPSI TECHNOLOGY Enables measurement in production-level vibrations, providing reliable data for an efficient workflow. Patented on-axis acquisition method does not require calibration. DYNAPHASE™ DYNAMIC ACQUISITION Enables the highest precision measurements in extreme vibration and air turbulent environments, and excellent correlation to temporal phase shifting interferometry (PSI)....

At the heart of every Zygo laser interferometer is the laser source. Powerful The highest laser power available enables DynaPhase to acquire data at its fastest camera shutter rate to freeze vibration. Each Zygo laser tube is manufactured, tested and certified to exacting standards in our U.S. production headquarters — the only interferometer manufacturer in the world to do so. We designed and manufacture our own laser to ensure the best possible performance and life expectancy for our products. For our customers this means performance for challenging applications like dynamic environments, and...

Zygo Laser HeNe laser source made to exacting standards for long life and high power. Vibration rejection for noise-free data enabled by proprietary technology. Optical Zoom True optical magnification improves spatial response. Mx™ software provides users with a powerful set of tools that sets it apart from standard data analysis and system control software. Zygo’s Mx instrument control and analysis software offers a wide range of operational features and a comprehensive data analysis suite including Zernike, Instantaneous measurements freeze vibration for precise measurements in any environment....

ZYGO LASER INTERFEROMETERS Zygo offers a complete line of laser interferometers enabling quick in-process checks and precise final metrology for the widest range of optical testing applications. Lenses, windows, mirrors Prisms, beamsplitters, corner cubes Camera lenses, laser optics, sub-assemblies Wafers, gratings, reticles, display glass Optical glass, crystals, IR materials Optical surface figure Wavefront quality Radius of curvature Optical material homogeneity Wedge, prism angle, corner cube Total thickness variation (TTV)

The Verifire interferometer is the workhorse of the optical shop, enabling everything from quick inprocess checks to precise final metrology, on the shop Zygo Laser floor to the quietest metrology laboratory. Packed with technology like QPSI, Zygo’s proprietary laser source, continuous optical magnification, and the latest Mx acquisition and analysis software, the latest generation of Verifire interferometers are reliable and easy to use for confident measurements, every time. Confidence in every measurement Optical Zoom

HIGH RESOLUTION PERFORMANCE Zygo. The go-to metrology expert when there is no room for error. The most demanding optics applications require the highest performance interferometry available. High-energy laser, semiconductor and lithography, remote sensing and free-space telecommunications are among the most demanding applications in the optics industry today. Zygo is the trusted source for the highest-resolution and precision interferometry available to support these and may other applications.