Zygo 3D Optical Profilers
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3D Optical Profilers ROBUST, NON-CONTACT METROLOGY SOLUTIONS FOR EXACTING APPLICATIONS

Zygo® is respected globally as an innovator and for providing best-in-class technologies, services, and solutions with a focus on surface metrology, position sensing, and optical components and assemblies. In a world where meeting and achieving precise tolerances are critical to the success of advanced applications, Zygo is your dedicated strategic partner.

o o o o o o achieving cutting-edge solutions Zygo has been at o o o o o the cutting edge o o o o o of ultra-precision o o o o o manufacturing for o o o o o 50 years. Zygo’s global, industry-wide a result of a dedicated team, the desire to succeed. Zygo’s four core values sit at the heart of all o o o o o o and an unwavering focus on timely, cost-effective, oand exceptional high-quality o o o o passion, experience, tenacity, and we do. In every way Zygo goes critical specification. Beyond Precision™.

OPTICAL METROLOGY Zygo has elevated the status of optical metrology to a disruptive, enabling technology. Optical metrology is an extremely versatile surface measurement tool for laboratory inspection and process control. It is non-destructive, non-contact, highly sensitive, and exhibits exceptional resolution and accuracy — all required in modern industrial and R&D applications. ROUGHNESS ZYGO LASER INTERFEROMETERS ZYGO 3D OPTICAL PROFILERS 1000 mm SURFACE SPATIAL WAVELENGTH Zygo’s optical metrology tools including our laser interferometers and 3D optical profilers measure the broadest...

Zygo optical profilers drive process control and optimization as they move beyond the quality lab and into production. Zygo 3D optical profilers are Customers benefit from Zygo’s 3D optical profilers are not just faster than traditional achieve best-in-class performance parameters when measuring stylus profiling in measuring through advanced, patented, and surface structure and texture surface areas. With large innovative technology solutions. across varying surface scales, fields of view and more pixels They are highly automated, including aeral surface roughness per measurement than less...

ZYGO TECHNOLOGY AND PROPRIETARY SOFTWARE COHERENCE SCANNING INTERFEROMETRY (CSI) Zygo 3D optical profilers use the principle of optical interference to measure a sample by comparing the light reflected from a test LIGHT SOURCE Aperature Stop surface to the light reflected from a reference mirror. This interference is sensitive enough to detect features smaller than Field Stop Combined reference and test beams 1 nm tall. In Zygo’s systems, the interferometer is the microscope objective, which BEAMSPLITTER provides magnification as well as the integrated reference. We offer a wide range of...

Part Finder & SmartSetUp ™ No guesswork or expert-level training required. Automatically optimizes data in >1 minute. Zygo Mx software provides a powerful set of tools that sets it apart from standard data analysis and system control software. ™ Precision metrology in vibration-prone environments. Precision and speed, with the lowest possible noise. Results of 0.06 nm sq with 0.005 nm repeatability – in just seconds. Regions Analysis The power of area measurements. Compare regions separated laterally and/or vertically. Custom Workspace Create customized interfaces and dashboards for...

ZYGO 3D OPTICAL PROFILERS Zygo 3D optical profilers provide metrology solutions for every industrial sector where there is a demand for cost-effective, reliable, repeatable, and accurate ultra-precision measurement. Non-contact metrology No consumables Vibration resistant For both the lab and process optimization Sub-nanometer precision at all magnifications ISO 25178 compliant results Automated configuration for ease-of-use Full 3D visualization of virtually any surface Vertical precision and high speeds are independent of magnification Up to 1.9 million data points in every measurement...

Zygo has engineered a full line of non-contact 3D optical profilers designed for an extensive range of applications. ZEGAGE™ PRO systems use Zygo’s interactive with nanometer-level precision, robust bench-top class profilers ideal for most industrial surfaces. analysis software for easy and For smoother optical surfaces, detailed visualization to help in process control. SureScan polished metallic components — surface, setting new standards technology, for vibration robust the ZeGage Pro HR offers more metrology, is now paired with Part than 20X better precision with flexibility, and...

Confidence in Metrology “On Zygo tools, instrument reliability is outstanding, which results in consistent long-term results.” – Jack Clark, Principal Scientist, WOODWARD, INC.

Each Zygo optical profiling system is characterized by superior performance, accuracy, speed, and precision. Stitching & Patterned Sampling Multiple Sample Stage Options than other commercially available in non-contact optical surface measurement, making it easy and fast to measure a wide with advanced SureScan range of surface types, including vibration reduction technology smooth, rough, flat, sloped, and configuration tools for quick and confident setup, while optional motorized sample staging enables Zygo’s Coherence Scanning measure multiple part segments, recipe-based in-tray part...

Sub-nanometer precision at all magnifications. NEXVIEW™ NX2 The Nexview NX2 is Zygo’s most and more precisely than any other results that comply to ISO 25178 advanced profiler, a fly-by-wire commercially available system. tool with no manual controls designed for the most exacting With applications as varied as deliver robust and precise flatness, roughness and waviness, measurements with minimal exceptional precision, advanced thin films, step heights, and more effort. Additionally, SmartPSI™ algorithms, application flexibility, technology ensures extremely fast and automation into a...