Co-innovating tomorrow™ YOKOGAWA mniiy Temperature Sensing Solutions Solving measurement problems using edge solution products

Sensing inaccessible temperatures Application 1: Temperature measurement of plasma environment Key products Equipment control DTSX Distributed Temperature Sensor FA-M3V/e-RT3 Plus Edge Controller Temperature measurement Fiber-optic cable (temperature sensor) Measuring internal chamber temperatures in plasma surface treatment used in semiconductor and printed circuit board manufacturing is difficult as metallic and conductive sensors cannot be used. Chamber Chamber Yokogawa's solution Internal chamber temperatures are measured using a fiber-optic cable as temperature sensor as it is not affected...

Sensing long-distance temperatures Application 3: Long-range temperature monitoring (1) Key products DTSX3000 Distributed Temperature Sensor FA-M3V/e-RT3 Plus Edge Controller GA10 GA10 Data Logging Software Monitoring FA-M3V/e-RT3 Plus Alarm generation & data processing Challenge The risk of cable fire increases when cable junction connections loosen and power cables age. Periodic monitoring of underground long distance cables is, however, difficult due to distance and installed location. Fiber-optic sensing Yokogawa's solution Fiber-optic cables are installed alongside power cables to detect...

Sensing wide-area temperatures Temperature data log with image display Application 5: Wide-area temperature sensing with thermal camera \ Key products GX20 Paperless Recorder Thermal Camera Solution i Challenge Waste disposal sites are faced with risks of stored waste igniting spontaneously. Due to a large site area and varying waste volume, however, it is difficult to install temperature sensors to enable early detection of a temperature rise in stored waste to prevent a fire outbreak. i Yokogawa's solution A FLIR high performance thermal camera is connected to a Yokogawa GX20 paperless recorder...