Specifications knaiyCzern,ra,ion Zirc°nia °xy9en C € The OX400 is a highly accurate and reliable low-con- centration zirconia oxygen analyzer that is capable of measuring a wide range of concentrations, from 0-10 ppm up to 0-100 vol% 02. This is the latest oxygen analyzer from Yokogawa, and its development was based on the company's long experience and strong track record with this technology. A proprietary new thin-film deposition technology was used in the zirconia sensor that creates a molecular bond between the zirconia element and the platinum layer. This prevents separation, enables a reduction in sensor size and ensures a high-speed response and long life. The OX400 can be used to control and monitor various semiconductor applications, and to control environ- ment, air leakage into inert gas, and other processes. Long life and high-speed response • Thanks to the use of Yokogawa's proprietary new thin-film deposition technology, the sensor has three times the lifespan of those used in our earlier prod- • A cylindrical sensor design facilitates the replacement of measurement gases, thereby helping to assure a high-speed response. High performance and high reliability • Superior repeatability and linearity even at low oxy- • Either pump or aspirator sampling can be selected, • CE, C-tick, cCSAus certification. Built-in functions and a variety of self-diagnosis • Comes with multi selector, auto range, partial range, and pump on/off functions • A variety of self-diagnosis functions are provided that detect malfunctions such as heater temperature error, temperature sensor burnout, and sensor resistance value error. Superior maintainability • The sensor can be replaced on-site. • Compact and lightweight for easy installation. • Oxygen concentration control in semiconductor-relat- ed diffusion and drying furnaces and in LCD manu- facturing processes • Oxygen concentration control in solder pot flow and re-flow ovens, and glove boxes used in electronics manufacturing, and in gas production processes • Oxygen concentration measurements to prevent dust explosions during powder transfer « I ^ iii • •« Yokogawa Electric Corporation GS 11M10B01-01E Yl)Kl)Cji\\A//\ 2-9-32, Nakacho, Musashino-shi, Tokyo, 180-8750 Japan ©Copyright Jun. 2009

2 Standard Specifications Measurement object : xygen concentrations in inert O gases containing no flammable gas, silica, corrosive gas, or liquid (including water vapor). Measurement system: Zirconia system Sampling method : Pump, aspirator, or no suction device. Pump and aspirator suction flow rate : Approx. 1.0 l/min. Aspirator suction conditions : ir or N2, supply pressure 65 to 100 A kPaG, total discharge flow 10 l/min max. (when gas inlet and outlet are at ambient atmospheric pressure). Sample gas conditions Flow rate : 200 ± 25 ml/min (only applies to sensor). Temperature : 0-50°C (non-condensing)....

3 Conformance to safety and EMC standards Installation altitude: 2000 m or less R Category based on IEC 61010: II (Note) , , US C Pollution degree based on IEC 61010: 2 (Note) Safety EN61010-1 : CAN/CSA-C22.2 No. 61010-1-04, Note: Installation category, called over-voltage category, specifies impulse withstand voltage.Category UL Std. No. 61010-1 II is for electrical equipment. EMC : N 61326-1 Class A, Table 2 E Pollution degree indicates the degree of exist (For use in industrial locations) ence of solid, liquid, gas or other inclusions EN 61326-2-3, EN 61000-3-2 which may reduce dielectric...

Panel mount type with built-in pump or no suction device (OX400----M/P) Mount Note: Pump ON/OFF switch; when no suction device [-N] is specified for the sampling method, this switch is not installed. Frame For the notes on panel mounting, see page 6. Ventilation holes Panel Cutout Panel mount type with aspirator (OX400--A--M/P) 260 (Line connection : in case of Rc1/4) For the notes on panel mounting, see page 6. Ventilation holes Screw 60 to 70 (Line connection : in case of 1/4NPT) (Line connection : in case of Rc1/4) Connector Bushing (Line connection : in case of 1/4NPT) Aspirator All Rights...

Desktop type with built-in pump or no suction device (OX400----M) With multi selector function Sample gas outlet For the notes on panel mounting, see page 6. 10 to 20 Note: Pump ON/OFF switch; when no suction device [-N] is specified for the sampling method, this switch is not installed. Desktop type with aspirator (OX400--A--M) (Line connection : in case of Rc1/4) Aspirator Bushing (Line connection : in case of 1/4NPT) With multi selector function Aspirator gas inlet (Φ6) Aspirator and sample gas outlet (Φ8) 10 to 20 350 For the notes on panel mounting, see page 6. All Rights Reserved. Copyright...

Notes on panel mounting 1. Make sure the bottom supports do not block the ventilation outlet on the bottom panel of the measuring instrument. 2. Maintain at least 100 mm of free space around the measuring instrument in order to ensure adequate ventilation. 3. Make sure the panel is at least 2 mm thick. Notes on desktop type installation Hot air is discharged from the air outlet on the rear panel of the OX400. Maintain at least 100 mm of free space around the OX400 to ensure adequate ventilation. Activated carbon filter of option code “/A” K9643KH: Rc1/4 K9643KJ: 1/4NPT Maintenance space The filter...

7 With aspirator (Sampling method [-A]) Filter2 Oxygen sensor Throttle valve (Operable from the front panel) Heater Restriction Aspirator Flow meter OUT Φ8 connector Note: If no suction device [-N] is specified, the aspirator is removed from this diagram. Wiring Diagram OX400 Rear Terminal (M3 screw) PUMP OFF Primary output Alarm (Oxygen concentration high/low) Contact output Pump ON/OFF Contact input (available when suffix code of with built-in pump “-P” specified) Error (Fail) Contact output (Note 2) (Note 3) Secondry output Range marker Contact output Power cord (two-pole plug with earthing...