Clean Room (Ammonia) Gas Monitor for Semiconductor Plants CM501 Clean Room (Ammonia) Gas Monitor for Semiconductor Plants Bulletin 12Y4F1-01E www.yokogawa.com CM501 The CM501 continuously and accurately measures ammonia gas or acid gases in clean rooms; a unique diffusion scrubber shortens the measurement time and increases the sensitivity. The CM501 monitor boosts productivity in the semiconductor industry.

Sample gas (clean room ambient gas) Absorbent liquid (Pure water circulation system) Gas Sampling pump Diffusion scrubber Selector valve Standard solution Eluent Eluent pump Sample pump Concentration column Automatic switching valve Separation column Analysis section Detector monitored on the trendgraphs on the workstation. minimize sample contamination. sold auto-exchanger). replenishment only once a month. Overview The sample gas is sampled so that only the gas component is absorbed in pure water using a diffusion scrubber and sent to the analysis section. Contained particles are discharged....

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