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CM501 Clean Room (Ammonia) Gas Monitor

CM501 Clean Room (Ammonia) Gas Monitor

Product catalog summary

Overview: The CM501 is a gas monitor designed for continuous and accurate measurement of ammonia and acid gases in semiconductor clean rooms. It utilizes a unique diffusion scrubber technology to enhance sensitivity and reduce measurement time, thereby improving productivity in the semiconductor industry.

System Configuration: The system includes the CM501 monitor and a workstation for data processing. The sample gas is absorbed in pure water using a diffusion scrubber, and particles are discharged. The system can measure up to 16 points with an optional auto-exchanger.

Features:

Ion chromatography analysis ensures high reliability.
Trend graphs on the workstation allow monitoring of changes over time.
Automated sampling minimizes contamination.
Low eluent consumption, requiring monthly replenishment.

Measurement Process:

The sample gas is captured in pure water using the diffusion scrubber.
The sample water is sent to a concentration column.
A switching valve directs the sample to a separation column with the eluent.
Components are separated and detected by a conductivity detector.
A chromatogram is obtained, and concentration is calculated using a standard solution.

Construction: The diffusion scrubber features a double tube structure with a porous Teflon film tube inside a glass tube, requiring less pure water and offering higher sensitivity than conventional methods.

Specifications:

Measuring item: Ammonia gas or acid gases
Collection method: Diffusion scrubber
Measuring method: Ion chromatography
Minimum detection limit: 0.01 µg/m³ (0.02 µg/m³ for acidic gases)
Fluent consumption: 0.2 ml/min
Measurement cycle: 20 to 90 minutes
Measuring points: One, optionally up to 16
Dimensions: 860 (W) x 730 (D) x 1060 (H) mm
Weight: Approximately 170 kg
Power supply: AC100 to 120V 50/60Hz, AC200 to 240V 50/60Hz

Additional Capabilities: By altering columns and materials, the system can measure other acid gases such as hydrochloric, nitric, phosphoric, and sulfuric acids.

Catalog excerpts

CM501 Clean Room (Ammonia) Gas Monitor -1

Clean Room (Ammonia) Gas Monitor for Semiconductor Plants CM501 Clean Room (Ammonia) Gas Monitor for Semiconductor Plants Bulletin 12Y4F1-01E www.yokogawa.com CM501 The CM501 continuously and accurately measures ammonia gas or acid gases in clean rooms; a unique diffusion scrubber shortens the measurement time and increases the sensitivity. The CM501 monitor boosts productivity in the semiconductor industry.

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CM501 Clean Room (Ammonia) Gas Monitor -2

Sample gas (clean room ambient gas) Absorbent liquid (Pure water circulation system) Gas Sampling pump Diffusion scrubber Selector valve Standard solution Eluent Eluent pump Sample pump Concentration column Automatic switching valve Separation column Analysis section Detector monitored on the trendgraphs on the workstation. minimize sample contamination. sold auto-exchanger). replenishment only once a month. Overview The sample gas is sampled so that only the gas component is absorbed in pure water using a diffusion scrubber and sent to the analysis section. Contained particles are discharged....

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CM501 Clean Room (Ammonia) Gas Monitor -3

Subject to change without notice. All Rights Reserved, Copyright c 1998, Yokogawa Electric Corporation. Vig-PMK-G·NS-05E Printed in Japan, 609(KP) [Ed :02/b] Represented by: YOKOGAWA ELECTRIC CORPORATION World Headquarters World Sales Headquarters 9-32, Nakacho 2-chome, Musashino-shi, Tokyo 180-8750, JAPAN Tel: +81-422-52-6316 Fax: +81-422-52-6619 YOKOGAWA CORPORATION OF AMERICA Sales, Service & Engineering-Texas 12530 W. Airport Blvd. Sugar Land, Texas 77478 Tel: +1-281-340-4215 Fax: +1-281-340-4250 YOKOGAWA EUROPE B.V. (Headquarters & Plant) Databankweg 20, 3821 AL Amersfoort, THE NETHERLANDS...

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