Aluminum Nitride Etching Disk • High electrical resistivity • High thermal conductivity • Mirror polished surface and high precision flatness • Excellent corrosion resistance BN Insluation Nozzles • High insulation • Acid, alkali, salt and organic reagent resistant INNOVACERAtechnical ceramic solutions Alumina Nozzles • High plasma durability • Gas flow rate control • High Purity Plasma Proof Ring • High plasma durability • High purity • High rigidity LITHOGRAPHY & CLEANING & INSPECTION Key Materials: Alumina, SiC Vacuum Chuck • Precision flatness • High plasma durability • Good chucking / de-chucking response • High temp, and low temp. Application • High thermal conductivity and uniform thermal distribution • High plasma durability • High electrical resistivity Alumina Rotating Parts • High purity • High precision inner circle runout • High rigidity Alumina Chamber Domes / Liners • High plasma durability • High purity • High rigidity EMAIL: [email protected] WEB: www.innovacera.com CERAMIC COMPONENTS SEMICONDUCTOR PROCESSING Engineered technical ceramics are widely used in semiconductor manufacturing process due to their high temperature stability, electrical insulation, corrosion resistance and excellent mechanical properties. INNOVACERA ultra-pure ceramics are used in the whole cycle semiconductor manufacturing process including wafer manufacturing, device manufacturing, and packaging. XIAMEN INNOVACERA ADVANCED MATERIALS CO.,LT

• Acid, alkali, salt, and organic reagent resistant • High purity • With anisotropy in the mechanics, heat, and electricity MATERIALS DATASHEET Properties Ceramic Components Materials Datasheet for Semiconductor Processing 99.99% BN Pyrolytic Boron Nitride Ceramic Substrate • Minimal deformation • High thermal conductivity • Stable insulation • Resistance the acid and alkali corrosion resistance Metallized Ceramics • Ceramic Materials: 95%, 99% Alumina, AIN • Excellent sealing and bond strength • Minimal substrate deformation • Universal applicability for ceramic metal joining • Uniform coating,...