厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. User Manual Wafer Level Automatic In-plane Magnetic Field Probe Station Model: DX1PS3 Add: Unit 405,10th Factory Building of Lianfa, No.34, Yuehua Road, Huli District, Xiamen, China 361006 Tel: (86) 0592 5237772 Mobile Phone: (86) 18030236818 Website: www.dexinmag.com E
Open the catalog to page 1厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. (1) Equipment Introduction 1. To use this device, certain operating procedures must be followed. Please read this text carefully before learning how to use it; 2. This device is a magnetic field probe station; 3. This device can provide a one-dimensional in-plane magnetic field not exceeding 330mT; 4. This device is mainly used for testing the electrical and magnetic properties of semiconductor materials, micro nano devices, magnetic materials, spintronics devices, and related technical fields. It can provide a magnetic field environment and...
Open the catalog to page 2厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. (2) Introduction to Each Module a、Probe Station Main Body: The main structure of the probe station includes an X-axis electric displacement table, a Y-axis electric displacement table, a Z-axis electric displacement table, a T-axis manual rotation displacement table, a CHUCK vacuum suction cup, a one-dimensional in-plane electromagnet, and aluminum alloy parts used to connect and fix the above components. ⚫ X-axis electric displacement table: with a stroke of ±150mm, it can be electrically controlled to operate automatically or manually, used...
Open the catalog to page 3厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. The main body diagram of the probe station is as follows: b、Probe holder, probe fixture, and connecting wire: The probe is installed on the probe fixture, which is mounted on the probe holder. By adjusting the adjustment knob on the probe holder, the probe tip can be moved to the sample to be tested. This device can simultaneously pin four probes (if more probes are needed, they need to be purchased separately). The diagram is as follows: Add: Unit 405,10th Factory Building of Lianfa, No.34, Yuehua Road, Huli District, Xiamen, China 361006 Tel:...
Open the catalog to page 4厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. c、Microscope and its bracket, display screen: The microscope is used to observe the sample to be tested and the needle insertion effect. By connecting the microscope camera and computer through a USB data cable, the microscopic image can be displayed on a 13 inch screen. d、System control and data acquisition module (control computer): The system control and data acquisition module includes a control computer and corresponding control programs. Real time control and data reading of the 6221 and 2182A can be achieved by connecting the control computer,...
Open the catalog to page 5厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. The diagram is as follows: e、Air floating platform: The air flotation platform is used to isolate the vibration source and avoid external vibration interference during testing. Add: Unit 405,10th Factory Building of Lianfa, No.34, Yuehua Road, Huli District, Xiamen, China 361006 Tel: (86) 0592 5237772 Mobile Phone: (86) 18030236818 Website: www.dexinmag
Open the catalog to page 6厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. f、Vacuum Pump: A vacuum pump is used to generate negative pressure, allowing the probe holder and wafer sample to be stably adsorbed onto the probe holder host and CHUCK suction cup. The diagram is as follows: g、Recirculating Cooler (Chiller): A Recirculating Cooler (Chiller) is used to cool the electromagnet so that it can be stably excited for a long time. The diagram is as follows: Add: Unit 405,10th Factory Building of Lianfa, No.34, Yuehua Road, Huli District, Xiamen, China 361006 Tel: (86) 0592 5237772 Mobile Phone: (86) 18030236818 Website:...
Open the catalog to page 7厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. h、DXMP-20/40 Excitation Power Supply for Electromagnet: The power supply is used to provide variable DC power to the electromagnet. i、6221 current source and 2182A nanovoltmeter (to be purchased separately): The diagram is as follows: Add: Unit 405,10th Factory Building of Lianfa, No.34, Yuehua Road, Huli District, Xiamen, China 361006 Tel: (86) 0592 5237772 Mobile Phone: (86) 18030236818 Website: www.dexinmag
Open the catalog to page 8厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. (3) Installation of equipment 1、Installation and leveling of air flotation platform 2、Place the probe station body on the air flotation table 3、Probe holder Installation 4、Microscope Installation 5、Recirculating Cooler Installation 6、Control Computer Installation Please refer to the equipment installation video provided by DEXINMAG for the above section. 7、6221 source meter and 2182 voltmeter (purchased by the end user) Installation (4) Connection of equipment cables/pipelines 1、Connection between probe station body and recirculating cooler:...
Open the catalog to page 9厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. 1.2、Connect one end of another transparent hose with a diameter of 8mm to the "return liquid" of the recirculating cooler and the other end to the "Water Out" interface of the probe station body. The diagram is as follows: 1.3、Open the valve, and the effect will be as shown in the above picture. 2、Connection between the probe station body and the DXMP-20/40 excitation power supply: 2.1、Connect one end of a magnet power cord to the circular socket of the probe station body, and connect the other two ends to the output port of the magnet power...
Open the catalog to page 10厦门盈德兴磁电科技有限公司 Xiamen Dexing Magnet Tech. Co., Ltd. 2.2、Connect one end of a 15 pin data cable to the DB15 connector behind the probe station body and the other end to the Hall probe interface behind the DXMP-20/40 excitation power supply. The diagram is as follows: 2.3、 Connect one end of a 4-core cable to the 4-core connector behind the probe station body and the other end to the Ext Fault interface behind the DXMP-20/40 excitation power supply. The diagram is as follows: Add: Unit 405,10th Factory Building of Lianfa, No.34, Yuehua Road, Huli District, Xiamen, China 361006 Tel: (86) 0592 5237772...
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