Catalog excerpts
XLS-1 series Compact and precise linear piezo stage The Xeryon Linear Stage (XLS) is a precise linear stage driven by an ultrasonic piezo motor. With the XLS, you can combine high-speed positioning with nanometre accuracy. Xeryon's ultrasonic piezo motor ensures you a long lifetime, noiseless and vibration-free operation and low energy consumption. In addition, the self-locking piezo motor holds the position of the stage when powered off. The reduced energy consumption and heat generation lead to a very stable nanopositioning system. The XLS is for instance used in metrology applications, e.g. part alignment or for sample movement under microscopes. The XLS can be stacked to an XY motion system. The XLS-1 series is available in different lengths and with the following options: | i-^ Material option: NM (non-magnetic) or NA (non-anodized) I-^ Atmosphere: A (normal) or HV (high vacuum) -► Bearing: PB (precision) standard Encoder: S (standard) or P (precision) -Length: 30 - 40 - 50-60-70-80 - 100 - 120 mm Travel range: 18 - 27 - 32 - 37 - 42 - 50 - 72 - 92 mm Mechanical properties Environmental compatibility Bottom/side view: Weight: 40 g (XLS-1-30) - 150 g (XLS-1-120) Load capacity: < 0.5 kg Holding & traction force: ~1 N Straightness & flatness: < 10 pm Pitch error: < 200 prad Fast and precise positioning Power consumption Moving, motor only: +/- 1 W Moving, incl. XD-C driver and AC adapter: < 2.5 W (typical) Idle, incl. XD-C driver and power adapter: 0.8 W Quasi noiseless operation High vacuum option: 10-6 mbar (HV) Version made of non-magnetic materials (NM) Non-anodized version (NA) Driver Compatible plug and play drivers: XD-U & XD-C Software: Windows interface and LabVIEW driver All specifications are subject to change without prior notice
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