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XLS-1 Series / Compact and precise linear piezo stage

XLS-1 Series / Compact and precise linear piezo stage
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XLS-1 Series / Compact and precise linear piezo stage

Product catalog summary
Overview
The Xeryon Linear Stage (XLS) is a high-precision linear stage powered by an ultrasonic piezo motor, offering high-speed positioning with nanometre accuracy. It is designed for applications such as metrology and microscopy, where precise part alignment and sample movement are critical. The XLS can be configured into an XY motion system and is available in various lengths with multiple options.
Mechanical Properties
  • Weight: Ranges from 40 g (XLS-1-30) to 150 g (XLS-1-120).
  • Load Capacity: Less than 0.5 kg.
  • Holding & Traction Force: Approximately 1 N.
  • Straightness & Flatness: Less than 10 µm.
  • Pitch Error: Less than 200 µrad.
Power Consumption
  • Moving (motor only): Approximately 1 W.
  • Moving (including XD-C driver and AC adapter): Less than 2.5 W (typical).
  • Idle (including XD-C driver and power adapter): 0.8 W.
Environmental Compatibility
  • Quasi noiseless operation.
  • High vacuum option available (10-6 mbar).
  • Non-magnetic and non-anodized versions available.
Driver and Software
  • Compatible with XD-U & XD-C plug and play drivers.
  • Software support includes a Windows interface and LabVIEW driver.
Performance Specifications
  • Standard Encoder: Minimum step size of 310 nm.
  • Precision Encoder: Minimum step size of 78 nm.
  • Maximum Speed: 100 mm/s.
  • Minimum Speed: Several µm/s.
  • Constant Speed: +/- 1% at typical scan speed (optional).
  • Lifetime: Greater than 100 km (typical).
Ordering Information
  • Travel Range: Options from 18 mm to 92 mm.
  • Encoder Options: Standard (S) or Precision (P).
  • Bearing: Precision (PB) standard.
  • Atmosphere: Normal (A) or High Vacuum (HV).
  • Material Options: Non-magnetic (NM) or Non-anodized (NA).
  • Length Options: From 30 mm to 120 mm.
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Catalog excerpts

XLS-1 Series / Compact and precise linear piezo stage-1

XLS-1 series Compact and precise linear piezo stage The Xeryon Linear Stage (XLS) is a precise linear stage driven by an ultrasonic piezo motor. With the XLS, you can combine high-speed positioning with nanometre accuracy. Xeryon's ultrasonic piezo motor ensures you a long lifetime, noiseless and vibration-free operation and low energy consumption. In addition, the self-locking piezo motor holds the position of the stage when powered off. The reduced energy consumption and heat generation lead to a very stable nanopositioning system. The XLS is for instance used in metrology applications, e.g. part alignment or for sample movement under microscopes. The XLS can be stacked to an XY motion system. The XLS-1 series is available in different lengths and with the following options: | i-^ Material option: NM (non-magnetic) or NA (non-anodized) I-^ Atmosphere: A (normal) or HV (high vacuum) -► Bearing: PB (precision) standard Encoder: S (standard) or P (precision) -Length: 30 - 40 - 50-60-70-80 - 100 - 120 mm Travel range: 18 - 27 - 32 - 37 - 42 - 50 - 72 - 92 mm Mechanical properties Environmental compatibility Bottom/side view: Weight: 40 g (XLS-1-30) - 150 g (XLS-1-120) Load capacity: < 0.5 kg Holding & traction force: ~1 N Straightness & flatness: < 10 pm Pitch error: < 200 prad Fast and precise positioning Power consumption Moving, motor only: +/- 1 W Moving, incl. XD-C driver and AC adapter: < 2.5 W (typical) Idle, incl. XD-C driver and power adapter: 0.8 W Quasi noiseless operation High vacuum option: 10-6 mbar (HV) Version made of non-magnetic materials (NM) Non-anodized version (NA) Driver Compatible plug and play drivers: XD-U & XD-C Software: Windows interface and LabVIEW driver All specifications are subject to change without prior notice

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