OEM MODULE FOR SEM APPLICATION wisman High voltage power supply iiJl ISO9001:2015 APPLICATION SPECIFIC INTRODUCTION STANDARD ET INTERFACE, RS-232 CONTROL ELECTRON MICROSCOPY, ELECTRON BEAM, ION BEAM POWERSYSTEM. HIGH ACCURACY, HIGH STABILITY, LOW RIPPLE. OVERVOLTAGE, OVERCURRENT, SHORTCIRCUIT ANDARC PROTECTION. CORONA FREE OPERATION OEM CUSTOMIZATION AVAILABLE Wisman's SEM Series is an integrated multiple output high voltage power supply specifically designed to drive Scanning Electron Microscope (SEM) Columns. Wisman's extensive knowledge in this application has enabled us to develop a range of technology platforms that can be customized to meet the demanding requirements of SEM. The main Acceleration Voltage is a high stability 30kV supply, with integrated floating Filament, Extractor and Suppressor outputs required to drive Field Emission, Cold Cathode and Schottky Electron Sources in a compact solution with extenders to mount in a 19'' rack. All outputs are offered with ultra-low output ripple, excellent regulation, stability, temperature coefficient, drift and accuracy specifications. Isolation and control of the respective floating sources is provided via Wisman's proprietary high voltage isolation techniques. Customer control of this integrated SEM power supply system is accomplished via a fiber optic interface. All high voltage safety interlocks are of a fail safe hardware based design and the SEM is CE marked and is designed to be compliant with applicable IEC, UL and SEMI standards. Wisman's SEM offers exceptional performance with low ripple, micro-discharge, and ppm level stability for unprecedented image quality and resolution. Scanning electron microscopy, Semiconductor analysisElectron beam; Ion beam,Semiconductor analysis, Ion beam etching,Focused ion-beam lithography,Vacuum gun, SEM SELECTION TABLE Accelerator Supply Extractor Supply ) 2019.2 Wisman High Voltage Power Supply Corp. All Rights Reserved

OEM MODULE FOR SEM APPLICATION ISO9001:2015 Page 2 of 3 SPECIFICATION -PARAMETER ) 2019.2 Wisman High Voltage Power Supply Corp. All Rights Reserved 020219

OEM MODULE FOR SEM APPLICATION wisman High voltage power supply iiJl APPLICATION SPECIFIC G ETHERNET DIGITAL INTERFACE TjF SEM DIMENSION Unit:inch(mm) BOTTOM VIEW SIDE VIEW 130 www.wismanhv.com ) 2019.2 Wisman High Voltage Power Supply Corp. All Rights Reserved ______