Gas distribution systems | Chip-tool support | Facilities support equipment Measurement solutions for semiconductor, solar, light

WIKA in brief A family business since 1946 > 11,200 employees Global service and distribution 1.2 billion euro turnover Quality management: ISO 9001, ISO 13485 Environmental WIKA’s unique experience and know-how make sensing technology smarter, add more value and prepare it for a sustainable future

WIKA KNOW-HOW Testing, packaging and preservation 6 Ultra High Purity pressure transducers 8 Pressure gauges and switches 10 Diaphragm pressure gauges 11 FACILITIES SUPPORT EQUIPMENT Exhaust and abatement monitoring 14 Pressure sensors for industrial applications 14 CDA, pneumatics and purity gas sticks 15 Process cooling water 15 WIKA’s UHP pressure gauge and transducer product lines offer customers in the semiconductor, photovoltaic and flat panel display industries a comprehensive portfolio of pressure measurement solutions for gas delivery systems and on-tool gas panels of the highest purity...

WIKA’s High Purity and Ultra High Purity products are designed to the rigorous standards and recommendations relevant to the semiconductor market and its governing agencies. UHP Bourdon tube pressure gauges have electropolished internal surfaces and are the standard gauge of gas distribution systems installed in semiconductor FABs. The bourdon tube UHP pressure gauge series is complemented by a diaphragm-based UHP pressure gauge offering the smallest possible dead space and shortest purge cycle times. WIKA’s UHP pressure transducers are electronic instruments of the smallest footprint which meet...

Media-wetted surfaces are designed to comply with SEMI standards and are compatible with semiconductor flammable, toxic and corrosive gases. While all reputable manufacturers comply with SEMI specifications, WIKA products go one step further incorporating technology with customer preference into every design. By allowing to select wetted surface area materials comprised of 316L double-melt stainless steel or proprietary VIM/VAR materials, the extensive configurability in terms of electrical and process connections makes the UT01 transducers perfect for both design-ins and retrofits. The accuracy...

TESTING, PACKAGING AND PRESERVATION In order to comply with the High Purity and Ultra High Purity (UHP) requirements of the semiconductor industry, WIKA UHP and HP products are cleaned, packaged and preserved in accordance with SEMI specifications. All UHP products are 100% helium leak tested to 1 x 10-9 scc/sec in an ISO class 6 cleanroom or better. Ensuring continued SEMI conforming quality of UHP products and manufacturing processes, WIKA assigns periodic analytical assessments carried out by RJ Lee Group, Inc. using analytical methods corresponding to SEMI F72 and SEMATECH 91060573B (AES),...

Given the increasing requirements in terms of quality and product safety, WIKA offers a wide range of approvals and certificates to best meet customer expectations and regulatory compliances. For hazardous applications, WIKA offers a host of international approvals for key locations in Asia, US and the EU.

The most compact design of the WUC series transducer meets the smallest product footprint requirements. The space-saving design and extensive configurability makes it the perfect fit for new, as well as retrofit projects. ■ Special features:■ Data sheet: < 0.5 % FS per IEC 61298-2 (< 0.2 % RSS) 30 ... 5,000 psi / 2 ... 360 bar (further pressure units available), Compound, absolute, gauge 4 ... 20 mA, DC 0 ... 5 V, DC 0 ... 10 V, Manual zero point setting PE 87.06 True vacuum reference The WU-2 series transducer combines state-of-the-art digital transducer concepts with analogue-like output signals...

Integrated display, EtherCAT The WUD-2x-E brings EtherCAT® down to the transducer level, enabling customers to gather more data, reduce cabling cost and increase tool reliability by leveraging the built-in cable redundancy. ■ Accuracy class: EtherCAT, Cable redundancy, Vacuum reference Manual or electronic zero point setting 30 ... 5,000 psi / 2 … 360 bar (further pressure units available), Compound, absolute, gauge Cable redundancy Due to the designated “IN” and “OUT” ports of the WUD-2x-E it can be connected to the main device in a ring topology. This, together with the full duplex capability...

Ultra High Purity Bourdon tube pressure gauge The 230.15 is the right choice for specialty gas, Ultra High Purity, PV and SEMI applications in gas distribution systems using face seal fittings. The 230.25 is best suited for applications that require VIM/VAR wetted parts and face seal fittings. Both product variants have electropolished media-wetted stainless steel surfaces, as well as electropolished stainless steel cases. Vacuum / compound and positive pressure ranges 2": Grade A per ASME B40.1, UHP Bourdon tube pressure gauge with switch contact The 230.15 and 230.25 series are complemented...

Diaphragm gauges are the perfect mechanical pressure gauge for low-pressure, point-of-use applications. The gauge’s design allows for use in potentially corossive gases in etch applications, reduces particle generation and decreases dry-down times. UHP Flow-Through-Gauge Sensitive installations, such as hook-up in chip fabs, require a specific focus on particle prevention. Using a flow-through gauge in a GDS eliminates any dead 432.25 space and shortens purge cycles after installation or maintenance. -1 ... 9 bar / -30 inHg ... 130 psi Grade B per ASME B40.1, (other accuracy classes upon request)...

Remote digital display Standard signals 2 relays TARE Function AC 230 V or AC 115 V AC 80.05 Specialty gas filling level control Gas cylinder scales are engineered and designed for liquid delivery sources used in both indoor and outdoor hazardous and non-hazardous applications.

UHP high-accuracy test gauge The 332.54-UHP is a high-accuracy “Inspector's Test Gauge” used to qualify equipment installations serving UHP upstream source and point-of-use applications within semiconductor fabrication facilities. ■ Nominal size: ■ Scale range: -30 inHg ... 600 psi: ±0.25 % of span (ASME B40.1 Grade 3A), 600 ... 2,000 psi: ±0.5 % of span (ASME B40.1 Grade 2A), 2,000 ... 5,000 psi: ±0.25 % of span (ASME B40.1 Grade 3A) 332.54-UHP Pneumatic hand pump ■ Pressure range:■ Medium: ■ Special features: Pressure and vacuum generation switchable, Low weight,