Watlow’s Adaptive Thermal Systems (ATS™) Technology Watlow’s State-of-the-Art Solutions Help Our Customers Improve Thermal Uniformity, Tuneability, Speed and Diagnostics Connects All the Systems in a Tool For a Full-System View of All Processes From the Chamber to the Abatement System Find out more about Watlow and how we can provide thermal solutions for your company: Phone: 1-800-WATLOW2 (1-800-928-5692) E-mail: [email protected] Watlow capabilities include: Design • Finite element analysis (FEA) and computational fluid dynamics (CFD) Website: www.watlow.com Infrared thermography Acoustic microscopy Rapid prototyping Lean product development Vacuum and plasma test chambers Over 12,000 square feet of cleanrooms from Class 10k to 100 Global manufacturing Statistical process control ™ With Yarbrough, Watlow now services the entire semiconductor fabrication process, from the tool to the scrubber, to ensure thermal optimization of the complete system. Watlow® Reduce system complexity Improve thermal performance provides semiconductor development teams with innovative thermal systems that give equipment manufacturers a competitive advantage. With the acquisition of Yarbrough Solutions Worldwide, Watlow now services end-user customers as well, offering: Obtain real-time system data Create high-zone configurations previously unavailable Asian Technical Support & Sales Offices European Technical Support & Sales Offices United States & Canada 1-800-WATLOW2 Energy savings North American Technical Support & Sales Offices Superior thermal system performance Watlow Products and Technical Support Delivered Worldwide Maintenance cost reductions Singapore Taiwan United Kingdom Latin American Technical Support & Sales Office Mexico Watlow® is a registered trademark of Watlow Electric Manufacturing Company. ATS™ is a trademark of Watlow Electric Manufacturing Company. ©2018 Watlow Electric Manufacturing Company Thermal Soluti

Watlow’s Innovative Thermal Solutions Enhance the Thermal Performance of Our Customer’s Critical Tools and Processes to Improve Wafer and Chip Throughput Adaptive Thermal Systems (ATS™) Engineering collaboration at your pace Deep domain knowledge Computational engineering Rapid prototyping Technology-leading products High-performance solutions Global support Onsite commissioning Watlow’s Smart Technologies Connect the Entire Thermal System Ensuring System Simplification, Performance Optimization an

Watlow’s Innovative Thermal Solutions Enhance the Thermal Performance of Our Customer’s Critical Tools and Processes to Improve Wafer and Chip Throughput Adaptive Thermal Systems (ATS™) Engineering collaboration at your pace Deep domain knowledge Computational engineering Rapid prototyping Technology-leading products High-performance solutions Global support Onsite commissioning Watlow’s Smart Technologies Connect the Entire Thermal System Ensuring System Simplification, Performance Optimization an

Watlow’s Adaptive Thermal Systems (ATS™) Technology Watlow’s State-of-the-Art Solutions Help Our Customers Improve Thermal Uniformity, Tuneability, Speed and Diagnostics Connects All the Systems in a Tool For a Full-System View of All Processes From the Chamber to the Abatement System Find out more about Watlow and how we can provide thermal solutions for your company: Phone: 1-800-WATLOW2 (1-800-928-5692) E-mail: [email protected] Watlow capabilities include: Design • Finite element analysis (FEA) and computational fluid dynamics (CFD) Website: www.watlow.com Infrared thermography Acoustic...

Watlow’s Adaptive Thermal Systems (ATS™) Technology Watlow’s State-of-the-Art Solutions Help Our Customers Improve Thermal Uniformity, Tuneability, Speed and Diagnostics Connects All the Systems in a Tool For a Full-System View of All Processes From the Chamber to the Abatement System Find out more about Watlow and how we can provide thermal solutions for your company: Phone: 1-800-WATLOW2 (1-800-928-5692) E-mail: [email protected] Watlow capabilities include: Design • Finite element analysis (FEA) and computational fluid dynamics (CFD) Website: www.watlow.com Infrared thermography Acoustic...

Watlow’s Adaptive Thermal Systems (ATS™) Technology Watlow’s State-of-the-Art Solutions Help Our Customers Improve Thermal Uniformity, Tuneability, Speed and Diagnostics Connects All the Systems in a Tool For a Full-System View of All Processes From the Chamber to the Abatement System Find out more about Watlow and how we can provide thermal solutions for your company: Phone: 1-800-WATLOW2 (1-800-928-5692) E-mail: [email protected] Watlow capabilities include: Design • Finite element analysis (FEA) and computational fluid dynamics (CFD) Website: www.watlow.com Infrared thermography Acoustic...

Adaptive Thermal Systems (ATSTM) Technology Watlow’s ATSTM Technology Optimizes Thermal System Performance to Meet Your Precise Application Needs Watlow’s Adaptive Thermal Systems (ATSTM) are a suite of technologies that combine sensing, heating and controlling in innovative ways to improve the thermal performance of a customer’s application. ATS technology integrates foundational technology platforms including power conversion, multi-loop control and sensing, integrated TCH junction temperature control and high TCR materials based temperature control to optimize performance that is specific...

ATS Technology Platforms Watlow’s ATS technology platforms deliver breakthrough performance in wafer processing applications by equipping systems to: Protect ceramics from breakage Lower sensor and integration costs Provide real-time feedback Improve thermal performance Create high zone configurations previously unavailable Obtain real-time system data Enable closed loop control for better performance Reduce complexity with fewer wires Ensure immunity to power quality issues High TCR Materials Based Temperature Control Power Conversion Regulate power up and down rather than on and off Measure...