SEMICONDUCTOR PROCESSING THERMAL TECHNOLOGIES FOR GLOBAL INDUSTRY

Watlow is the global leader in providing innovative thermal solutions for semiconductor applications ranging from crystal growth through front-end wafer process to back-end assembly. Ever since the first diode, temperature has played an important role in semiconductor manufacturing processes. Watlow was there at the beginning and continues to provide proven results to the industry’s processes including in-situ deposition, etch and photolithography. Watlow’s solutions are based on an understanding of the Semiconductor Technology Roadmap. As dimensions shrink, temperature as a critical process...

importance for equipment and process engineers. Watlow meets the ongoing demands of the industry and the thermal challenges of new semiconductor processes. We continue to invest in R&D, global manufacturing and sourcing and introductions of new thermal technologies and solutions. To better serve the semiconductor industry, Watlow has design, manufacturing, sales and technical support facilities in Asia, Europe and North America. We have developed new thermal technologies for deposition, dry and wet etch, photolithography, test and back-end assembly. As a global company, we support international...

Table of Contents Gas Delivery and Pump Line Thermal Solutions High Uniformity Gas Delivery Line Heaters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . STRETCH-TO-LENGTH® Gas Delivery Line Heaters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . SERIES EHG Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Pump Line Heaters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Temperature Control Consoles . . . . . . . . . . . ....

Controlling temperature of gases delivered to a vacuum chamber and out the pump lines is essential as the industry develops new processes in alignment with the Semiconductor Technology Roadmap. Platform based tools are designed to not only increase throughput, but also increase the thermal management challenges involved with providing consistent deposition and etch processes. Yields increase and preventative maintenance frequency can decrease when delivery and exhaust gases are controlled within the prescribed process parameters. Watlow’s gas and pump line heating systems were developed to provide...

A number of gases used in semiconductor wafer processing require uniform heating of the gas lines in order to prevent condensation and potential contamination of the wafer process. Condensation occurs at cold spots and may result in expensive maintenance and tool down time. Contamination occurs when hot spots in the gas line cause the gases to break down and results in reduced yields. Watlow's High Uniformity Temperature Solution starts with thermal profiling the gas lines in order to understand the thermal gradients resulting from component mass, material and physical orientation. The standard...

Watlow’s STRETCH-TO-LENGTH® gas line heating system was developed as an easy-to-assemble temperature solution with performance superior to heat tape. The flexibility of these heaters give engineers the ability to compensate for the size of different components thus reducing the potential for hot and cold spots. Watlow’s STRETCH-TO-LENGTH heaters are UL® recognized for U.S. safety standards and are SEMI S2-93 compatible with a high limit thermocouple and controller. Silicone Rubber Heater Specifications Easy to install two part system • Conveniently fits on most gas line configurations • Heater...

Watlow developed the SERIES EHG temperature controller for gas and pump line heater applications. This new thermal solution includes a compact temperature controller, thermocouple sensor and power switching device that are integrated into the heater’s power cord. The SERIES EHG reduces system costs and substantially extends the life over conventional thermostat solutions. Features and Benefits Long operational life • Improves system reliability Tight temperature control • Assures process accuracy Small sensor footprint • Fits with almost any heater • Responds quickly to temperature changes •...

Watlow’s pump line heating systems work to reduce buildup of solids in LPCVD, PECVD and metal etch vacuum piping systems. This reduction in buildup helps reduce particle generation and eliminates unscheduled maintenance downtime; therefore, improving the consistency of yields and ultimately saving time and money. Watlow’s pump line heating systems are compliant with global guidelines and specifications including CE, NEC, UL® and SEMI S2-93. Silicone Rubber Outer Jacket Applications LPCVD • Silicon nitride • Titanium nitride Metal etch • Aluminum • Tungsten Snap Fastener Silicone Sponge Insulation...

Thermal solutions for gas delivery and pump line heating require precision temperature control. The best process control is achieved through PID temperature algorithms. Typically, several temperature zones are required to heat a line because of length, amperage and thermal mass of the stainless components. A turnkey temperature control console simplifies control and installation of the thermal subsystem. Watlow control consoles are plug and play and ready for installation in a tool or wafer fab. The control consoles have everything necessary to power and control a gas or pump line including temperature...

Uncontrolled thermal gradients in a vacuum chamber substantially reduce process repeatability and wafer yields. The harsh environment including chemical, plasma, vacuum and temperature increases potential for process contamination. One solution does not work for all vacuum-based applications. Watlow designs metal and ceramic heater and sensor components that are compatible with most vacuum environments. Watlow’s new ceramic heaters include AIN and AIO3 based designs that offer precise high temperature pedestal heater solutions for bake stations and in-situ vacuum environments. Metal heaters can...