Pump Line INCREASE TOOL UPTIME AND PROCESS YIELDS PUMP AND GAS LINE HEATING SYSTEMS

|Pump and Gas Line Heating Systems Problem Lines must be heated uniformly to prevent condensation in the gas delivery line or particle clogging in the pump line. Both gas and pump lines have unique thermal challenges due to many factors including poor conductivity of stainless steel, different thermal mass of plumbing components, or ambient temperature changes between the cleanroom and suboor. Condensation forms in gas lines when temperatures and/or pressure falls below the vapor state. Unheated pump lines have sublimation buildup due to poor and uneven heating. Heat trace can produce a ribboning...

Process by-products exit the chamber in vapor phase, but vacuum pump when gas temperatures drop, forming

|Pump and Gas Line Heating Systems Integrated System Solution One supplier for thermal components; one supplier for thermal systems The solution to achieving the optimum performance is through an intelligently designed heating system. Unlike other companies that just make heaters, sensors or controllers, Watlow designs and manufactures all of these thermal system components into a complete system. Working with a partner whose products are found throughout the semiconductor manufacturing process offers a single responsible supplier that understands how thermal systems t within the whole process....

Pump and Gas Line Heating Systems | 5 Optimum Line Heating and Process Performance Typical Applications Gas delivery lines • Boron trichloride, BCl3 • Chlorine triuoride, ClF3 • Dichlorosilane, (DCS), SiH2Cl2 • Tetra ethyl orthosilicate, TEOS • Tungsten hexauoride, WF6 • Process gas line qualication Fore line and exhaust lines for CVD and metal etch • Low Pressure Chemical Vapor Deposition (LPCVD) — TEOS, Ti Nitride • Plasma Enhanced Chemical Vapor Deposition (PECVD) — TEOS, Ti Nitride, Tungsten, Oxynitride Plasma Etch • Aluminum etch • Tungsten etch Both gas and pump lines have unique thermal...

|Pump and Gas Line Heating Systems Modular Pump Line Heaters The tight contact t of Watlow’s pump line heaters provide superior, uniform heating of transfer lines. Agency Certication, Recognition Compliance and Approvals (Contact factory for specic application and approvals.) • Complies with SEMI S2-93 standards • UL® recognized for U.S. and Canadian safety standards • CE • NEC (National Electrical Code), Article #427-23 • 120 and 208VÅ(ac) standard. Consult factory for other voltages • Power lead wires: 102 mm (4 in.) #18 AWG UL® 1180/CSA Teon® insulated, rated 10A, lead wire pair encapsulated...

Pump and Gas Line Heating Systems | 7 Pump Line Options x = Minimum requirements o = Optional features 6 mm (0.25 in.) insulation w/HOT marking 13 mm (0.5 in.) insulation Ground grid AMP Mate-N-Lok® connectors a AMP CPC connectors b Jacket w/UL®94V-0 rating Jacket w/UL®94-HB rating Thermal cut-off a Male plug: AMP p/n 1-480698-0, w/sockets AMP p/n 350689-1. Female cap: AMP p/n 1-480699-0, w/pins AMP p/n 350690-1. b Plug: AMP p/n 206060-1, w/socket AMP p/n 66101-3. Receptacle: AMP p/n 206153-1, w/pins AMP p/n 66099-3, w/ground pin p/n 164164-2 if ground grid option is chosen. Outer Surface Temperature...

|Pump and Gas Line Heating Systems Modular Gas Line Heaters Uniform heating of gas lines prevents condensation of gases including: BCl3, ClF3, DCS, HCl3, TEOS and Ti Nitride Gas Delivery TEOS, BCl3, AlCl3, ClF3 and DCS are gases that condense or liquefy due to a phase shift at low temperatures. The condensation occurs in the gas line and puddles in the shower head before being injected into the vacuum chamber. A substantial number of wafer defects will occur if liqueed gases are injected into the vacuum chamber. Uniform heating of the lines will prevent condensation. TEOS lines are typically...

Pump and Gas Line Heating Systems | 9 Integrated Control Systems Watlow’s integrated control systems provide stable and adjustable control of heated systems. • Tight adjustable control to within 1°C (33.8°F) • Adjustable set points • High temperature alarms The integration of electronic temperature control within gas and pump line heating systems is critical to providing superior system performance and achieving maximum results. Temperature control systems provide process and maintenance engineers with maximum exibility to modify temperature proles as application requirements change. In heating...

|Pump and Gas Line Heating Systems • Dimensions: 1 zone: 119.3 mm H x 76.2 mm W x 190.5 mm D (4.7 in. H x 3.0 in. W x 7.5 in. D) 2 zone: 114.3 mm H x 152.4 mm W x 190.5 mm D (4.5 in. H x 6.0 in. W x 7.5 in. D) 3 zone: 114.3 mm H x 304.8 mm W x 190.5 mm D (4.5 in. H x 12.0 in. W x 7.5 in. D) 4 zone: 114.3 mm H x 304.8 mm W x 190.5 mm D (4.5 in. H x 12.0 in. W x 7.5 in. D) Control consoles (table-top-mount) • 1 to 4 zones of control • 10A per zone maximum • 120VÅ(ac), 1 phase or 208VÅ(ac), 3 phase • Type J or Type K thermocouple inputs (other sensor types available) • IDE style fused power input...

Pump and Gas Line Heating Systems | 11 Ordering Information Description Safety Warning Watlow heaters are designed for optimum process results. Proper usage does not include hazardous or outdoor locations; and total or partial immersion applications. For safety purposes, it is Watlow’s recommendation that these heaters should only be installed on grounded metallic tubing systems or ground fault interuptor (GFI) protected circuits. CE ST EDU CtOensity R MWat D o ters STEw SYNew LLine HeaOption ith 6 mm (0.25 in.) insulation w/HOT marking 13 mm (0.5 in.) insulation Ground grid AMP Mate-N-Lok® connectors...

12 IPump and Gas Line Heating Systems Straight Heater Sections (continued) * To complete the code number, please reference build-to-code chart on page 20.

Pump and Gas Line Heating Systems | 13 UCE ST y D REDMWCtOensit E at TLow Heaters n Sw SYNemp Line c) Optio With 90° Radius Elbow Heaters • 6 mm (0.25 in.) or 13 mm (0.5 in.) silicone rubber sponge insulation available • With or without tangents • Will t both butt-weld and anged style tubing elbows Without tangent With tangent 45° Radius Elbow Heaters • 6 mm (0.25 in.) or 13 mm (0.5 in.) silicone rubber sponge insulation available • With or without tangents • Will t both butt-weld and anged style tubing elbows Without tangent With tangent * To complete the code number, please reference build-to-code...