Maintaining uniform temperature in a vacuum chamber is critical for establishing consistent processes. High performance metal sheath heaters are the choice for many of the CVD and plasma etch vacuum chamber applications. Heaters are an integral component in the vacuum chamber’s critical thermal subsystems. Watlow uses our application expertise to design special heaters that meet precision semiconductor specifications for heating external chamber walls and lids and in-situ wafer chucks. Electrical, thermal, mechanical and environmental specifications determine the best heater solution. FIREROD® distributed wattage FIREROD Cartridge Heaters Watlow’s FIREROD® cartridge heaters provide superior heat transfer, uniform temperature and resistance to oxidation and corrosion, even at high temperatures. FIREROD heaters can be cleanroom compatible using Teflon® insulated lead wires or mineral insulated leads which feature a stainless steel sheath. FIREROD Maximum Watt Density–Heating Metals Nickel-chromium resistance wire • Precisely wound and centered in the unit, assures even, efficient distribution of heat to the sheath Minimal spacing between the element wire and sheath • Results in lower internal temperature, giving you the ability to design with fewer or smaller heaters that operate at higher watt densities UL® and CSA approved flexible stranded wires • With silicone fiberglass oversleeve, insulate the wire to temperatures of 250˚C (480˚F) Incoloy® sheath • Resists oxidation and corrosion from many chemicals, heat and atmospheres Incoloy® is a registered trademark of Special Metals Corporation. 16 - Deposition and Etch Vacuum Chamber Thermal Management Solutions Teflon® is a registered trademark of

Cable Heaters The versatile Watlow cable heater can be formed to a variety of shapes for high-tech semiconductor applications. Cable heaters from Watlow are small diameter, high-performance units, fully annealed and readily bent to desired configurations. Flat spiral cable heater configurations are the heart of many turnkey platen heater assemblies. Coil assemblies are used in wire bonding, while flat spiral assemblies are used in photolithography and chemical vapor deposition. Star wound cable heaters can be used for a variety of nitrogen, air and liquid applications. Features and Benefits High...

Round and Flat Tubular Heating Elements High performance tubular heaters are used in both radiant and convection modes to provide uniform temperature profiles in core wafer process applications. Tubular elements and assemblies from Watlow generate all the heat necessary in these processes; and are virtually 100 percent energy efficient. Sheath Watt Density vs. Sheath Sheath Watt Density—W/cm Temperature 3.0 4.0 6.0 MgO insulation filled sheath • Maximizes dielectric strength, heat transfer and life Sheath Temperature—°C Safe Allowable Watt Density Limit Sheath Temperature—°F High temperature...