Optical Measuring System UHL MS5

Product catalog summary

Overview: The document describes the UHL MS5 optical measuring system, which is based on a modular concept allowing customization for various measuring tasks. It is suitable for both topographic and semiconductor measurements, offering flexibility in configuration to meet specific customer needs.

Specifications: The MS5 system is built on a precision granite and steel pipe frame, with dimensions and weight specified in the document. It operates optimally at a temperature of 20 ± 5° C and requires a power supply of 230 VAC, 50 Hz. The measuring axes include a range of 420 x 300 mm for the KT9 stage and 350 x 350 mm for the GT9 stage, with a Z-axis range of 200 mm and a resolution of 0.1 µm.

Optical Features: The system offers magnification from 50x to 5000x and various illumination options, including transmitted and coaxial incident light, ring light, quadrant ring light, and oblique incident light.

Software Options: The MS5 system supports different software solutions tailored to specific applications. OMS is a user-friendly 2D measuring software for random tests and initial sample inspections. IMS is a fully automated software for serial measurements, and QC5000 provides comprehensive 3D measuring capabilities.

Applications and Customization: The MS5 system can be tailored to specific applications, ensuring that customers only pay for the features they need. It supports a wide range of sensors and microscopes, making it versatile for various optical measuring tasks.

Catalog excerpts

Optical Measuring System UHL MS5 On the basis of a modular concept the optical measuring system MS5 provides the opportunity to solve different measuring tasks. Technische Mikroskopie

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Made-To-Measure Metrology Due to its modular basic concept configuration of MS5 can be exactly attuned to customer`s application. Mere incident light application, e.g. topographic measurement or measuring of semiconductor parts do not require transmitted light and open-frame measuring stages. In such cases our cross stage GT9 in closed frame design is applied. Because of its high straightness/flatness and a measuring range of 350x350 mm this measuring stage is suitable for measurements of 12“ wafers - also with two sensors. The open frame stage KT9 (measuring range 420x300 mm) is used for classical...

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Optical Measuring System UHL MS5

Optical Measuring System UHL MS5

Catalog excerpts

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