Optical Measuring System UHL MS5 On the basis of a modular concept the optical measuring system MS5 provides the opportunity to solve different measuring tasks. Technische Mikroskopie

Made-To-Measure Metrology Due to its modular basic concept configuration of MS5 can be exactly attuned to customer`s application. Mere incident light application, e.g. topographic measurement or measuring of semiconductor parts do not require transmitted light and open-frame measuring stages. In such cases our cross stage GT9 in closed frame design is applied. Because of its high straightness/flatness and a measuring range of 350x350 mm this measuring stage is suitable for measurements of 12“ wafers - also with two sensors. The open frame stage KT9 (measuring range 420x300 mm) is used for classical...