SOLAR MASTER SM Series Max. Vacuum level Supply air pressure : 3 ~ 6bar , max 6bar Air consumption Working Temp. ■ Mainadvantages ✔ Integrated with the VMECA Vacuum Cartridge ✔ Minimal air is consumed while achieving very fast and stable vacuum ✔ The PEEK material dissipates static when handling solar cells ✔ Low vacuum will help protect the solar cells from being damaged ✔ Standard cell size is 5"(125mm) and 6" (156mm). Also, available in Wafer size ➋ Efficiency Valve • No Mark - Not applied EV - Efficiency Valve ➌ Support Point • No Mark - Not applied P - Support Point ➍ Material of suction plate A PK PO Specifications subject to change without notice

Exhaust Port

SOLAR MASTER Dimension information Flange mount Proximity Sensor Suction Plate Material : AL, PEEK, POM Exhaust port Technical Data Model SM 05.. Holding force (N), at different air inlet pressure (bar) 3 Air Consumption (Nl/min), at different air inlet pressure (bar) 1.7 Specifications subject to change without notice