Valved Cracker for Arsenic 500cc Mark V Valved Cracker for Arsenic • Patented design with more than 800 in the field • Utilizes a nozzle for excellent flux uniformity and reduced material waste • Provides mechanical flux control for near instantaneous response • More economical to operate than a standard source Description The patented Veeco Valved Cracker for Arsenic is the source that revolutionized solid source MBE. Used in hundreds of MBE systems worldwide, it is the industry standard arsenic source for R&D and production. The innovative design of the Veeco Valved Cracker provides the convenience of a gas source with the safety of a solid source. The solid arsenic is heated within the large capacity crucible to generate beam flux. A refractory metal needle valve regulates the gas flow into an independently heated cracking zone. Adjustments to the cracking zone temperature may be performed to generate either As4 or As2 beams. With recent enhancements, the Mark V Valved Cracker for Arsenic incorporates a nozzle that provides excellent flux uniformity and reduced material waste. This improvement in material utilization results in: Material cost savings Longer campaigns Shorter system cleaning time Less hazardous waste generation • Reduced memory effects • Lower particulate levels and flaking • Reduced system window coating Principle of operation for the Valved Cracker. Source material is loaded into the large capacity crucible (A) and heated. A needle valve in the conductance tube (B) regulates the amount of evaporant which enters the growth chamber. Valve position is controlled with either a manual micrometer or with an Automated Valve Positioner (C). Cracking zone (D) temperature is controlled so as to produce beams of either cracked or uncracked material and an integrated nozzle (E) optimizes the flux uniformity across the substrate while minimizing material waste.

The Veeco Valved Cracker for Arsenic is available in a range of sizes for compatibility with all MBE systems. In many cases, more than one size is offered to accommodate applications with high arsenic usage. The exit nozzle is customized to the specific MBE system for excellent flux uniformity across a wafer or a platen. A Veeco SMC-II Automated Valve Positioner is recommended for use with this source for reliable, automated control of the needle valve. Linearity of control provided by Valved Cracker valve mechanism, as measured by an ion gauge bean flux monitor. The Valved Cracker for Arsenic...

Product Specifications Source Characteristics 2.2kg shaped Maximum Charge charge Capacity (based on 50% 1.4kg packing density) chunk As Minimum Mounting Flange Size Standard 2.75”/70mm With Water-Cooling 4.5”/114mm Standard 4.5”/114mm Standard or with Water-Cooling With Water-Cooling 6”/152mm 6”/152mm In-Vacuum Length Standard Standard 2.4”/61mm 1.41”/36mm With Water-Cooling With Water-Cooling 3.6”/92mm 2.2”/56mm External Dimensions Contact Veeco Crucible Dimensions/Interior Fill Port Diameter Standard 3.1”/79mm 4.75”/121mm With Water-Cooling 3.9”/99mm Typical Operating Temperatures Bulk Zone...

Valved Cracker for Arsenic Selection Guide Typical Source Commonly Used Indicated By “X” System 500cc X Veeco sources are also available for use on systems from Eiko, Anelva, Ulvac, SVTA, and DCA, as well as custom chambers. Contact Veeco for details. Solutions for a nanoscale world.™ Compound Semiconductor • MBE Operations 4900 Constellation Drive, St. Paul, MN 55127 USA Phone: (651) 482-0800, Fax: (651) 482-0600 www.veeco.com/mbe © 2009 Veeco Instruments Inc. All rights reserved. (6-09) GEN200 and GEN2000 are registered trademarks and GEN II, GEN III, GEN930, GEN10, GEN20 and Solutions for...