TurboDisk EPIK®700 GaN MOCVD System

Product catalog summary

Introduction: This document provides a comparison of three reactor platforms introduced between 2010 and 2014, focusing on their specifications, capabilities, and performance metrics.

Specifications: The reactors compared are EPIK700, MaxBright, and K465i. The EPIK700 was introduced in 2014 with a size of 700 mm, while MaxBright and K465i were introduced in 2011 and 2010, respectively, both with a size of 465 mm.

Wafer Capacity: EPIK700 and MaxBright can handle 4” and 6” wafers with a yield of 62 and 56 respectively, whereas K465i handles only 12 wafers.

Reactor Capacity: EPIK700 and MaxBright are capable of operating with multiple reactors, specifically 2 and 4 reactors respectively, enhancing their productivity. K465i operates with a single reactor.

Software Features and Productivity: EPIK700 is rated as the best in software features and productivity, followed by MaxBright which is rated better, and K465i which is rated good.

Multi-Reactor Capability: Both EPIK700 and MaxBright have multi-reactor capabilities, which is a significant advantage for productivity.

Catalog excerpts

TurboDisc CaN MOCVD System Comparison "LED manufacturing is very competitive due to industry consolidation and the decreasing price of LED bulbs. I am under pressure to lower manufacturing costs to protect my gross margins while adding capacity to my fab. We are running at about 90% capacity right now and need to add capacity to meet accelerating demand for general lighting adoption. Therefore, we need high productivity, high yield and reliable MOCVD systems." TurboDisc9 MOCVD Product Release Timeline for improved flow distribution Enhanced uniformity and yield MaxBright* Multi-Reactor MOCVD System chamber configuration > Central robot to transfer wafer carriers > Modular frame and shared > Nexus control software > Up to 20% cost per wafer reduction compared to previous generations > Best-in-class uniformity drives > Highest productivity reactor generates 2.5x throughput advantage compared > Seamless process transfer from existing TurboDisc MOCVD systems Find out more at www.veeco.com/mocvd Veeco MOCVD 145 Belmont Drive | Somerset, NJ 08873 ©2014 Veeco Instruments Inc. All rights reserved. Veeco, TurboDisc, EPIK700 MaxBright, K4E5I and FlowFlange are trademarks of Veeco Instruments Inc. Patents pending. Veeco reserves the right to change specifications and other product information without notice. Printed in USA 8/2014. Innovation. Performance Brilliant.

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TurboDisk EPIK®700 GaN MOCVD System

TurboDisk EPIK®700 GaN MOCVD System

Catalog excerpts

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