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TurboDisc K475i As/P MOCVD System

TurboDisc K475i As/P MOCVD System

TurboDisc K475i As/P MOCVD System

Product catalog summary
Introduction
The document introduces the TurboDisc K475i As/P MOCVD System, a cutting-edge solution for high-volume LED production, offering the highest productivity and lowest cost of ownership in the industry. It is designed for the production of red, orange, yellow LEDs, multi-junction III-V solar cells, laser diodes, and transistors.

Key Features
  • Uniform FlowFlange Technology: This new technology ensures best-in-class uniformity and process repeatability, leading to greater yields and reduced particle generation.
  • Robust Reactor Design: The design allows for ease-of-use, faster recovery post-maintenance, and maximum uptime.
  • High Productivity: Achieved through high growth rates and maximum uptime, resulting in the industry's highest throughput.
  • Low Cost of Ownership: Due to low consumable costs and high throughput.

Performance Advantages
  • Uniformity and Repeatability: The system offers excellent uniformity and repeatability, with improved wavelength uniformity for greater yield.
  • Ease of Maintenance: Fast recovery after maintenance and easy tuning for process optimization.
  • Flexibility: Seamless transition between wafer sizes and upgradable from previous K tool platforms.

Technical Specifications
  • Distributed Bragg Reflector (DBR) Wavelength Uniformity: Average inner wafer wavelength is 633 nm with 0.3% uniformity, and average outer wafer wavelength is 634 nm with 0.4% uniformity.

Conclusion
The TurboDisc K475i As/P MOCVD System is positioned as the leading solution for LED production, offering unmatched uniformity, ease-of-use, and cost efficiency, making it a valuable asset for high-volume production environments.
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Catalog excerpts

TurboDisc K475i As/P MOCVD System-1

Introducing the LED Industry’s Highest Productivity As/P MOCVD System with the Best-in-Class Yields TurboDisc® K475i™ As/P MOCVD System for LED Production Industry’s Highest Productivity and Lowest Cost of Ownership MOCVD System for High Volume LED Production > New Uniform FlowFlange™ technology enables best-in-class uniformity and process repeatability capable of driving greater yields > Robust reactor design provides ease-of-use and faster recovery after maintenance for maximum uptime > Industry’s highest productivity due to high growth rates and maximum uptime > Low consumable costs and industry’s highest throughput provide industry’s lowest cost

 Open the catalog to page 1
TurboDisc K475i As/P MOCVD System-2

Unmatched Uniformity Advancements Veeco’s new TurboDisc K475i As/P MOCVD System is the industry’s best reactor for the production of red, orange, yellow (R/O/Y) LEDs, as well as multi-junction III-V solar cells, laser diodes and transistors. The K475i system features a new reactor design incorporating Veeco’s Uniform FlowFlange technology producing films with very high uniformity and improved withinwafer and wafer-to-wafer repeatability with the industry’s lowest particle generation. The simple design of the Uniform FlowFlange technology provides ease-of-tuning for fast process optimization and...

 Open the catalog to page 2
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