TurboDisc GaN

Product catalog summary

Introduction: This document provides a comparison of three reactor platforms introduced between 2010 and 2014, focusing on their specifications, productivity, and capabilities.

Specifications:

EPIK700 (2014): Size: 700 mm, 4” Wafers Yield: 62, 6” Wafers Yield: 24, Multi-Reactor Capable: Yes (2 Reactors)
MaxBright (2011): Size: 465 mm, 4” Wafers Yield: 56, 6” Wafers Yield: 24, Multi-Reactor Capable: Yes (4 Reactors)
K465i (2010): Size: 465 mm, 4” Wafers Yield: 12, 6” Wafers Yield: 6, Multi-Reactor Capable: No

Software Features: The EPIK700 is rated as the best in software features, followed by MaxBright with better features, and K465i with good features.

Productivity: EPIK700 leads in productivity, followed by MaxBright, with K465i being the least productive.

Multi-Reactor Capability: Both EPIK700 and MaxBright support multi-reactor configurations, enhancing their productivity and efficiency.

Catalog excerpts

TurboDisc CaN MOCVD System Comparison "LED manufacturing is very competitive due to industry consolidation and the decreasing price of LED bulbs. I am under pressure to lower manufacturing costs to protect my gross margins while adding capacity to my fab. We are running at about 90% capacity right now and need to add capacity to meet accelerating demand for general lighting adoption. Therefore, we need high productivity, high yield and reliable MOCVD systems." TurboDisc9 MOCVD Product Release Timeline for improved flow distribution Enhanced uniformity and yield MaxBright* Multi-Reactor MOCVD System chamber configuration > Central robot to transfer wafer carriers > Modular frame and shared > Nexus control software > Up to 20% cost per wafer reduction compared to previous generations > Best-in-class uniformity drives > Highest productivity reactor generates 2.5x throughput advantage compared > Seamless process transfer from existing TurboDisc MOCVD systems Find out more at www.veeco.com/mocvd Veeco MOCVD 145 Belmont Drive | Somerset, NJ 08873 ©2014 Veeco Instruments Inc. All rights reserved. Veeco, TurboDisc, EPIK700 MaxBright, K4E5I and FlowFlange are trademarks of Veeco Instruments Inc. Patents pending. Veeco reserves the right to change specifications and other product information without notice. Printed in USA 8/2014. Innovation. Performance Brilliant.

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TurboDisc GaN

TurboDisc GaN

Catalog excerpts

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