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TurboDisc EPIK700 MOCVD System

TurboDisc EPIK700 MOCVD System

Product catalog summary

Introduction
The document introduces the TurboDisc EPIK700 GaN MOCVD System by Veeco, highlighting its advancements in productivity and yield to enhance customer profitability. The EPIK700 is positioned as a market leader in MOCVD tools, building on the success of previous models like the K465i and MaxBright.

Specifications and Features
The EPIK700 offers the highest productivity in the MOCVD platform with up to a 20% improvement in Cost of Ownership (CoO). It is designed for best-in-class yield and rapid production with easy process transfer. The system supports larger capacities, accommodating 31x4” and 12x6” wafers, and features advanced automation and improved serviceability.

Innovations
Key innovations include IsoFlangeTM Technology for improved flow uniformity and TruHeatTM Technology for enhanced temperature uniformity. The EPIK700 also incorporates AcuRampTM for advanced temperature control.

Performance and Efficiency
The EPIK700 significantly lowers costs per wafer, offering a 20% CoO advantage. It provides a 30% increase in capital efficiency and yielded throughput, and a 54% increase in footprint efficiency. The system's capacity increase improves throughput by 122% compared to previous models.

Conclusion
The EPIK700 is presented as the most efficient capital investment for maximum profitability, driving down LED bulb costs and setting a new standard in the MOCVD industry.

Catalog excerpts

Another breakthrough from Veeco. This time it’s EPIK. Introducing the new TurboDisc EPIK700 MOCVD System September 4, 2014 1 | Introducing TurboDisc EPIK700 GaN MOCVD System Brighter World. Better Future

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EPIK700 Raises the Bar TO A NEW LEVEL of Productivity and Yield to Maximize Customers’ Profitability 2014 EPIK700 Extends Veeco’s Leadership MaxBright Becomes Market Leading MOCVD System K465i Becomes Market Leading MOCVD System Highest productivity MOCVD platform with up to 20% improved CoO #1 selling MOCVD tool Best in class yield #1 selling MOCVD tool Compact cluster architecture Leader in yield and productivity MaxBright is yield and productivity leader Fastest to production with easy process transfer Most efficient capital investment for maximum profitability

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EPIK700 to Drive LED Bulb Cost Roadmap Lower EPIK700 • • Best in class yield Highest productivity 2012 DOE LED Bulb ASP Roadmap Actual LED Bulb ASP Trend Note: Actual LED Bulb ASP may vary depending on customer use cases and region. 3 | Introducing TurboDisc EPIK700 GaN MOCVD System Copyright ©2014 Veeco Instru

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LED Industry’s Highest Productivity and Lowest Cost of Ownership MOCVD System Highest productivity MOCVD platform with up to 20% improved CoO compared to previous generations Designed for best-in-class uniformity which provides greater wafer yield Fastest to production with easy process transfer Most efficient capital investment for maximum profitability EPIK700 Significantly Lowers Customers’ Costs Per Wafer | Introducing TurboDisc EPIK700 GaN MOCVD System Copyright ©2014 Veeco Instruments In

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EPIK700 Maximizes Productivity Key innovations: Larger Capacity 31x4” 12x6” AcuRampTM Advanced Temperature Control Improved Serviceability Advanced Automation | Introducing TurboDisc EPIK700 GaN MOCVD System Copyright ©2014 Veeco Instruments In

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Best-in-Class Uniformity with Key Innovations Key innovations: IsoFlangeTM Technology Improved flow uniformity TruHeatTM Technology Improved temperature uniformity | Introducing TurboDisc EPIK700 GaN MOCVD System Copyright ©2014 Veeco Instruments Inc.

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TurboDisc EPIK700 MOCVD System

TurboDisc EPIK700 MOCVD System

Catalog excerpts

All VEECO catalogs and technical brochures