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SPECTOR-HT

SPECTOR-HT

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SPECTOR-HT

Product catalog summary

Pump-Down Specifications:
- Achieves 2x10^-6 in 22 minutes.
- Achieves 8x10^-7 in 35 minutes.

Masking System:
- Features two user-configurable masks.
- Movement is controlled by recipes.

Dimensions:
- Width: 108.6 inches (276 cm).
- Depth: 90.6 inches (230 cm).
- Height: 91.1 inches (232 cm).

Deposition Source:
- RF Gridded with filamentless neutralizer.

Deposition Rates:
- Ranges from 4-7 Å/second, depending on material and fixture.

Four-Planet Fixture:
- Diameter: 310 mm each.
- Coating area: 3000 cm².
- Radial uniformity: ≤±0.25% across 310 mm diameter.
- OMS Enabled: Yes.

Two-Planet Fixture:
- Diameter: 400 mm each.
- Coating area: 2500 cm².
- Radial uniformity: ≤±0.5% across 400 mm diameter.
- OMS Enabled: Yes.

Catalog excerpts

Ion Beam Deposition System Ion Beam Optical Film Quality at Physical Vapor Deposition Rates • Up to 400% increased system throughput • Reduced time-to-process • Optimized tool geometry improves material uniformity • Optical endpoint control on planetary fixtures for improved yield • Up to 300% target material utilization improvement

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Deposition System Veeco's SPECTOR-HT™ Ion Beam Deposition System achieves unprecedented levels of productivity by offering the highest throughput for precision optical thin films. Building on the Veeco's proven ion beam deposition technology, the SPECTOR-HT increases deposition rate, lot sizes, target utilization and reduces time to process. SPECTOR-HT achieves ion beam quality films at physical vapor deposition (PVD) rates. Innovation. Performance. Brilliant. Planetary fixture with four 310mm planets SPECTOR-HT Applications • Beam Splitters • Anti-Reflective Coatings/High-Reflective Coatings...

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SPECTOR-HT

SPECTOR-HT

Catalog excerpts

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