Ion Beam Deposition System Ion Beam Optical Film Quality at Physical Vapor Deposition Rates • Up to 400% increased system throughput • Reduced time-to-process • Optimized tool geometry improves material uniformity • Optical endpoint control on planetary fixtures for improved yield • Up to 300% target material utilization improvement

Deposition System Veeco's SPECTOR-HT™ Ion Beam Deposition System achieves unprecedented levels of productivity by offering the highest throughput for precision optical thin films. Building on the Veeco's proven ion beam deposition technology, the SPECTOR-HT increases deposition rate, lot sizes, target utilization and reduces time to process. SPECTOR-HT achieves ion beam quality films at physical vapor deposition (PVD) rates. Innovation. Performance. Brilliant. Planetary fixture with four 310mm planets SPECTOR-HT Applications • Beam Splitters • Anti-Reflective Coatings/High-Reflective Coatings...