Valve Positioner Veeco valved sources * Automated remote local manual control * Repeatable operation control utilizing optically encoded position feedback regulatory compliance The Veeco SMC-II Automated Valve Positioner enables local manual (keypad) or automated (computer) control of the fluxes generated from Veeco Valved Crackers. It provides fully automated positioning of the source's needle valve, resulting in flux control, as well as remote control of the valve position via the automated valve positioner's remote interface. The servo motor assembly provides the actual valve positioning (and, hence, flux control) through a lead-screw assembly which connects to the valved crackers's needle valve stem. The LCD front panel of the automated valve positioner allows configuration, calibration, and direct user-control of servo motor functions. The user can change modes by cycling through the screens, adjusting parameters, and performing valve movement and automatic homing functions. The automated valve positioner provides for three ways to control the valve on a Veeco Valved Cracker: • Manual Mode. Freely move the valve by rotating the helical coupler located on the servo motor assembly while the controller acts as a digital micrometer. • Local Control. Movement of the valve to four predefined positions as well as "jog" the valve incrementally using keypad controls on the front panel of the • Remote Control. Movement of the valve via Veeco's Molly Growth Control Software (or other process control software) on the system control computer, which connects to the automated valve positioner's remote interface.

Valve Positioner Product Specifications Regulatory Compliance Solutions for a nanoscale world. Compound Semiconductor • MBE Operations 4900 Constellation Drive, St. Paul, MN 55127 USA © 2009 Veeco Instruments Inc. All rights reserved. (9-09) Solutions for o nonoscole world is o trademark of Veeco.