Catalog excerpts
Qyest Optical Monitor: Precision Control of Layer Endpoints Results in Improved Repeatability and Exceptional Process Control • Up to a 10x improvement in layer thickness control compared to previous generations • Increased production utilization through reduction in calibration runs • Less than 0.1% repeatability even with non-consecutive runs • Easy set-up with user-friendly interface • Fully integrates into existing SPECTOR®and SPECTOR-HT™ IBD systems
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Quest Optical Monitor Veeco's Quest™ Optical Monitor provides non-quarterwave control directly on production substrates. Multiple algorithm choices and selectable wavelength ranges allow control of leading edge optical designs. Hardware Specifications Short Wave Pass Filters Bandpass Filters With Wide OD6 Blocking Single Side AR Coating Broad Band AR Coatings Without Much Transmission Signal Change Innovation. Performance. Brilliant. Find out more at www.veeco.com ©2015 Veeco Instruments Inc. All rights reserved. Veeco, Quest, SPECTORand SPECTOR-HT are trademarks of Veeco Instruments Inc....
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