Efficient, safe means Easy process monitoring using Molly Growth Control Due to the pyrophoric (burns on contact with air) nature of phosphorus source material and the by-products generated in the MBE process, Veeco's Phosphorus Recovery System (PRS) is designed to provide a convenient and safe method of removing white phosphorus from the growth module prior to venting the system for maintenance and/or source reloading. In contrast to other systems currently in use, it also allows the trapped white phosphorus to be neutralized by aqueous oxidation. This virtually eliminates the danger of phosphorus auto-ignition. The Veeco PRS is an integrated unit connected to the growth module, isolated via a gate valve. Pumps work in tandem to capture the phosphorus within a removable phosphorus recovery (cryogenic) trap that provides a safe, convenient means for transporting phosphorus for neutralization. The process is controlled and closely monitored through Molly® Growth Control Software to ensure the system is running properly. If an error is detected, Molly initiates a process to abort to prevent a catastrophic failure. The components that make up the PRS consist of: • Vacuum equipment (scroll pump, turbo pump, vacuum gauge, and associated • Electrical equipment (phosphorus recovery controller, turbo pump controller and vacuum gauge controller) • System hardware (cryogenic traps, chambers and liquid nitrogen system) The Veeco PRS is available in two model designs to accommodate low volume or high volume manufacturing of compound semiconductors.

Recovery System Low Volume PRS Product Specifications * As measured from the floor to the top of the cryogenic trap tubes. High Volume PRS Product Specifications Solutions for a nanoscale world.™ Compound Semiconductor • MBE Operations 4900 Constellation Drive, St. Paul, MN 55127 USA © 2009 Veeco Instruments Inc. All rights reserved. (1 1 -09) Molly is o registered trademark and GEN II, GEN930 and Solutions for nonoscole world ore trademarks of Veeco.