SUMO Source The patented Low Temperature SUMO® Source is the best available source for non-valved evaporation of high vapor pressure materials. The SUMO source is comprised of a dual filament heater tailored to a uniquely shaped crucible. The source is operated in hot-lipped mode to prevent flux shadowing and source occlusion caused by material recondensation at the crucible lip. The Low Temperature SUMO Source is enclosed in a heat-shielding package designed for optimal source responsiveness and stability in the operating range of 100-750°C. Temperature stability is critical with high vapor pressure materials, since even a small temperature variation produces a dramatic change in flux. Heat radiated from the substrate manipulator sometimes makes it difficult to maintain a stable beam flux at very low source operating conditions. Due to the • Shutter transients virtually material quality • Uniformity depends on fill level and crucible shape • Shutter transients reduced material quality • Uniformity depends on fill level and crucible shape • Shutter transients may exist material quality In comparison/ the SUMO Source is the best available source for non-valved evaporation of high vapor pressure materials. Schematic of low temperature insert with SUMO crucible. SUMO Source * Patented design with * Dual filament hot-lip crucible orifice • SUMO design combines excellent uniformity with large charge capacity

smaller orifice size, this effect is significantly reduced when using a SUMO source in place of a conical or cylindrical crucible. SUMO Crucible The unique patented crucible features: • A cylindrical reservoir for large charge capacity and minimized long-term depletion effects • A small tapered orifice for optimal flux distribution • An exit cone for excellent flux uniformity with minimal wasted material • PBN construction for optimal material quality Temperature stability of Veeco Low Temperature Single Filament Source, evaporating organic compounds. An optional insert is available to restrict...

Product Specifications for Single-Wafer MBE Systems Source Characteristics Charge Materials Recommended for use with high vapor pressure materials typically evaporated or sublimed in the 100-750°C range Crucible Type Crucible Material PBN typical. Contact Veeco to inquire about other available materials Filament Type Dual Ta wire heater filaments, independently controllable Mounting Flange Size (Note—may be larger if integral shutter is selected) With Water-Cooling Two Type K (Chromel/Alumel) One band, one flag Thermocouple Type In-Vacuum Length With Water-Cooling (Note—may be larger if integral...

Product Specifications for Multi-Wafer MBE Systems 1800g Offset Source Characteristics Charge Materials Recommended for use with high vapor pressure materials typically evaporated or sublimed in the 100-750°C range Crucible Type Crucible Material PBN typical. Please contact Veeco to inquire about other available materials Filament Type Dual Ta wire heater filaments, independently controllable Minimum Mounting Flange Size Contact Veeco Thermocouple Type In-Vacuum Length Contact Veeco Contact Veeco Typical Operating Temperature Maximum Outgassing Temperature 1000°C (using both filaments) Water...