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K465i

Product catalog summary

Introduction
The document introduces the TurboDisc K465i GaN MOCVD System, a part of Veeco's K-Series platform, designed for high-volume production of HB LEDs. It emphasizes the system's high productivity, low cost of ownership, and superior yield capabilities.

Key Features

Uniform FlowFlange® Technology: This patent-pending technology ensures uniform alkyl and hydride flow across all wafers, resulting in superior uniformity and repeatability with minimal particle generation.
High Productivity: The system offers the industry's highest productivity due to full automation and a short recovery period after maintenance.
Low Maintenance: TurboDisc technology enables high system availability and throughput with minimal maintenance requirements.

Performance and Efficiency

Yield and Uniformity: Capable of achieving up to 90% yield in a 5nm bin, with excellent within-wafer uniformity and wafer-to-wafer repeatability.
Cost-Saving Extendibility: The system supports seamless transition to larger wafer sizes up to 8 inches.

Technical Specifications
The document includes a graph illustrating normalized thickness across radial positions, highlighting optimal experiments and modeling for wavelength uniformity with a standard deviation of 1.55nm at 461nm.

Conclusion
The TurboDisc K465i GaN MOCVD System is presented as a highly efficient, low-maintenance solution for LED production, offering best-in-class yields and productivity.

Catalog excerpts

K465i GaN MOCVD System Lowest Cost of Ownership GaN MOCVD System Combines Industry’s Highest Productivity With Best-in-Class Yields • Superior uniformity and repeatability with new Uniform FlowFlange® technology • Industry’s highest productivity due to full automation and one-run recovery period after maintenance • Low maintenance TurboDisc® technology enables highest system availability • Production-proven platform offers lowest cost o

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TurboDisc K465i GaN MOCVD System Cost-Saving Extendibility SEAMLESS TRANSITION TO LARGER WAFER SIZES UP TO 8” The TurboDisc K465i™ GaN MOCVD System is the newest entry into Veeco’s K-Series platform, which is productionproven and provides high productivity and reduced cost of ownership in HB LED high-volume production fabs around the globe. The K465i achieves up to 90% yield (5nm bin) due to its superior uniformity and excellent run-to-run repeatability. It also offers the industry’s highest productivity due to its full automation and shortened recovery period after maintenance. At the heart...

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K465i

K465i

Catalog excerpts

All VEECO catalogs and technical brochures