Delivery Solutions Veeco's Gas Source Delivery System (GSDS) provides precise control of gases, interlocks and monitoring for inert, hazardous and flammable gases. Molly® ECS1 Growth Control Software provides for easy integration to your existing system. The Veeco GSDS is available in three model designs to accommodate different applications, and budgets. Model options include one circuit or two, scroll or turbo vent pumping, in varying panel or cabinet configurations. All GSDS packages are inclusive of: • Manual gas line shut off valve for each circuit • Mass flow controller • Pneumatically controlled run and vent valves * Efficient, safe means • Easy process monitoring using Molly Growth Control Growth Control

GSDS Model Specifications Innovation. Performance. Brilliant. 4900 Constellation Drive, St. Paul, MN 55127 USA © 201 0 Veeco Instruments Inc. All rights reserved. (7-1 0) Molly is o registered trademark and Solutions for nonoscole world is o trademark of Veeco.