Gas Source Delivery System
Gas Source Delivery System
Veeco's Gas Source Delivery System (GSDS) offers precise control and monitoring for inert, hazardous, and flammable gases, integrating seamlessly with existing systems through Molly® ECS1 Growth Control Software. The GSDS is available in three models to suit various applications and budgets, featuring options for one or two circuits, and different vent pumping configurations.
- Manual gas line shut-off valve for each circuit
- Gas filter/purifier and mass flow controller
- Pneumatically controlled run and vent valves
- Compatible with all MBE systems integrated with ECS1 Version of Molly Growth Control Software
- GSDS-100: Supports inert gases, one or two circuits, scroll vent pump, no exhaust requirement for inert gases, panel configuration, non-upgradeable.
- GSDS-300: Similar to GSDS-100 but includes gas supply interlocks and regulators, turbo and scroll vent pump, e-rack mountable controller, panel configuration, non-upgradeable.
- GSDS-500: Supports inert, hazardous, and flammable gases, up to four circuits, turbo and scroll vent pump, requires exhaust for hazardous/flammable gases, cabinet configuration, upgradeable, includes additional safety interlocks and options.
- Vent vacuum and growth module pressure interlocks
- Gas supply low pressure interlocks
- Additional interlocks for GSDS-500 include IV-IR flame detection, local exhaust, hazardous coaxial gas delivery line leak, and enclosure door closed.
- Gas supply regulator and N2 purge gas circuits available for GSDS-300 and GSDS-500
- Standard features include gas line leak check ports, purifiers, and complete enclosed gas circuits with local exhaust for GSDS-500
- Communications via Modbus TCP/IP over Ethernet
Veeco Instruments Inc., 4900 Constellation Drive, St. Paul, MN 55127 USA. Phone: (651) 482-0800, Fax: (651) 482-0600, www.veeco.com/mbe
Catalog excerpts
Delivery Solutions Veeco's Gas Source Delivery System (GSDS) provides precise control of gases, interlocks and monitoring for inert, hazardous and flammable gases. Molly® ECS1 Growth Control Software provides for easy integration to your existing system. The Veeco GSDS is available in three model designs to accommodate different applications, and budgets. Model options include one circuit or two, scroll or turbo vent pumping, in varying panel or cabinet configurations. All GSDS packages are inclusive of: • Manual gas line shut off valve for each circuit • Mass flow controller • Pneumatically controlled run and vent valves * Efficient, safe means • Easy process monitoring using Molly Growth Control Growth Control
Open the catalog to page 1
GSDS Model Specifications Innovation. Performance. Brilliant. 4900 Constellation Drive, St. Paul, MN 55127 USA © 201 0 Veeco Instruments Inc. All rights reserved. (7-1 0) Molly is o registered trademark and Solutions for nonoscole world is o trademark of Veeco.
Open the catalog to page 2All VEECO catalogs and technical brochures
Quest OMS2 Pages
SPECTOR-HT2 Pages
Apex Gas Mixing Solution2 Pages
Ammonia Resistant Components2 Pages
GENxplor R&D MBE System2 Pages
5cc Dual Dopant Source2 Pages
GENxplor™2 Pages
K465i2 Pages
The WaferStorm® Platform2 Pages
The WaferEtch® Platform2 Pages
PROPEL Power GaN2 Pages
TurboDisc® K475i™ As/P2 Pages
TurboDisc GaN1 Page
Low Temperature SUMO Source4 Pages
Valved Cracker for Sulfur4 Pages
Valved Cracker for Selenium4 Pages
Single Filament Source3 Pages
Valved Cracker for Arsenic4 Pages
High Temperature Source4 Pages
Solutions for Carbon Doping2 Pages
Phosphorus Recovery System2 Pages
- Laser engraving machine
- PVD deposition machine
- Thin-film deposition machine
- Valve positioner
- Melting pot
- Rotary valve positioner
- Thermal evaporation deposition machine
- CVD deposition machine
- Ion beam-assisted deposition machine
- Deposition machine with rotating cathodes
- Optoelectronic deposition machine
- Electric valve positioner
- Lithography system
- MOCVD deposition machine
- Motorized valve positioner
- Ion sputtering source