Corrosive Series Valved Cracker 200cc Mark V Corrosive Series Valved Cracker • Patented all-PBN crucible and valve mechanism with more than 175 in the field • Only valved antimony source with proven results The patented Veeco Corrosive Series Valved Cracker is the only proven all-PBN valved source available on the market today. This innovative technology offers valved flux control for reactive high-vapor pressure materials (such as antimony and tellurium) not compatible with the metal crucibles and valves of traditional valved sources. The source design utilizes an entire valve assembly, crucible, and conductance tube constructed exclusively of pyrolytic boron nitride (PBN) to protect them from corrosion. • Utilizes a nozzle for excellent flux uniformity and reduced material waste The valve assembly is removable, allowing easy loading of the large capacity crucible through the conductance tube. The crucible is heated to generate a beam flux. Gas flow is regulated through the PBN valve, providing rapid flux stabilization, quick shut-off, and excellent reproducibility. In the cracking zone, a molecular flux may be thermally cracked to smaller molecular or atomic species. The source can also be operated in uncracked mode, if desired. • Highly reproducible mechanical flux control • Large charge capacity • Permits operation in cracked or uncracked mode • Compatible with Sb, Te, Cd, CdTe, Zn and Mg Principle of operation for the Corrosive Series Valved Cracker. Source material is loaded into the PBN crucible through the conductance tube and heated. An all-PBN valve regulates the gas flow into the growth chamber. The valve must be controlled with a Veeco SMC-II Automated Valve Positioner. Heating of the conductance zone keeps the valve clear and provides thermal cracking of polyatomic species. An integrated nozzle optimizes the flux uniformity across the substrate while minimizing material waste.

A near linear flux response is observed over a wide range of valve positions. Data courtesy of UC Santa Barbara. Flux reproducibility is demonstrated in two separate runs through the same valve position sequence. Data courtesy of UC Santa Barbara. SIMS analysis of composition variation in linearity graded GaAs1-xSbx. Data courtesy of UC Santa Barbara. With recent enhancements, the Mark V Corrosive Series Valved Cracker incorporates a nozzle that provides excellent flux uniformity and reduced material waste. This improvement in material utilization results in: • • • • • • • SIMS step profile for...

Product Specifications Source Characteristics Charge Material Sb, Te, Cd, CdTe, Zn, Mg, along with other corrosive materials Maximum Charge Capacity Minimum Mounting Flange Size Standard 4.5”/114mm With Water-Cooling 6”/152mm Standard 6”/152mm With Water-Cooling 6”/152mm In-Vacuum Length Standard 2.2”/56mm With Water-Cooling 2.7”/69m3 Standard 3.4”/36mm With Water-Cooling 4.1”/104mm External Dimensions Contact Veeco Crucible Dimensions/Interior Maximum Charge Diameter Cracking Zone Conductance Zone Bulk Zone Cracking Zone Conductance Zone Bulk Zone Typical Operating Temperature Maximum Outgassing...

Corrosive Series Valved Cracker Selection Guide Typical Source Commonly Used Indicated By “X” Veeco sources are also available for use on systems from Eiko, Anelva, Ulvac, SVTA, and DCA, as well as custom chambers. Contact Veeco for details. * Available only in Mark IV design. For More Information Please contact the Veeco Sales Department and request a copy of the following application notes: • The Corrosive Series Valved Cracker for Antimony • Effects of Antimonide Growth in a III-V MBE System Solutions for a nanoscale world.™ Compound Semiconductor • MBE Operations 4900 Constellation Drive,...