^Vpex Gas Mixing System The Complete Solution for Precision Point-of-Use Gas Mixing • Optimized for applications requiring low concentration, high precision and cost sensitive gas mixtures • Improves repeatability by 10x or more when compared to individual gas cylinders • Increases system up-time by eliminating excursions and re-qualifications, and reducing test time • Immediately reduces gas purchase costs by as much as 60% • Seamlessly integrates with existing installed base for a wide range of applications including solar, semiconductor and more • The only gas mixing system that uses Veeco's Piezocon® Gas Concentration Sensor for ppm-level control

Veeco's Apex™ Gas Mixing System addresses critical issues facing semiconductor manufacturers and foundries - material costs, process repeatability and system up-time. • Apex allows manufacturers to reduce costs by purchasing lower-cost, higher-concentration gases and then diluting at the point of use. Depending on the concentrations and quantities needed, this can translate to a material cost savings of up to $40,000 per month. • Built around Veeco's Piezocon Gas Concentration Sensor, Apex provides real-time process repeatability unmatched in the industry. For example, Apex can deliver GeH4 at...