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Ammonia Resistant Sources and Heaters

Ammonia Resistant Sources and Heaters
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Ammonia Resistant Sources and Heaters - 1

Ammonia Resistant * Extended life sources • SUMO® crucible available with optimal minimized depletion Using ammonia (NH3) as the nitrogen source is becoming increasingly more common due to the ability to achieve high growth rates and for its ease of control. Consequently, ammonia can dramatically reduce equipment lifetime. Due to hydrogen embrittlement, it is not uncommon for source and heater filaments to last only a few months. Therefore, equipment uptime is compromised, leading to shorter campaign lengths and high repair costs. Utilizing special ammonia resistant materials, Veeco enables operation of its innovative and proven sources and substrate heaters in high ammonia partial pressures. Veeco's ammonia resistant sources and heaters are currently available for temperatures up to 1200°C with ammonia partial pressures as high as Substrate Heater Product Specifications

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Ammonia Resistant Sources and Heaters - 2

Source Product Specifications 1 SUMO capacities designate recommended useful capacity in cubic centimeters (cc) with nominal Ga capacity indicated for SUMO Sources. Other crucible capacities are nominal and do not represent useable capacities. 2 Larger source capacities available for multi-wafer production systems such as GEN200®, Riber 49 and VI 00 Systems. 4 óOcc, 400g (70cc) and 1 25cc capacity sources require a 2.5" I.D. port. 5 For medium temperature sources. Low temperature versions are also available for increased stability at lower operating temperatures. Solutions for a nanoscale...

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Ammonia Resistant Sources and Heaters 2Pages

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Ammonia Resistant Sources and Heaters
2Pages