Ammonia Resistant Components • Extended life sources and heaters for ammonia environments • SUMO® crucible available with optimal flux distribution and minimized depletion effects • Sources and substrate heaters for ammonia partial pressures up to 1x10-4 Torr • Sources for temperatures up to 1200°C Description Using ammonia (NH3) as the nitrogen source is becoming increasingly more common due to the ability to achieve high growth rates and for its ease of control. Consequently, ammonia can dramatically reduce equipment lifetime. Due to hydrogen embrittlement, it is not uncommon for source and heater filaments to last only a few months. Therefore, equipment uptime is compromised, leading to shorter campaign lengths and high repair costs. Utilizing special ammonia resistant materials, Veeco enables operation of its innovative and proven sources and substrate heaters in high ammonia partial pressures. Veeco’s ammonia resistant sources and heaters are currently available for temperatures up to 1200°C with ammonia partial pressures as high as 1x10-4 Torr. Substrate Heater Product Specifications Filament Material Heat-Shielding Material Maximum Outgassing Temperature Maximum Operating Temperature Maximum NH3 Partial Pressure Thermocouple Type Maximum Substrate Size Backside Optical

Source Product Specifications Capacity1,2 In-Vacuum Diameter Filament Style Crucible Shape Minimum Flange Size Optional 4.5”/114mm flange or larger required Optional 4.625”/ 118mm flange or larger required Integral Shutter Optional 4.5”/114mm flange or larger required Optional 4.625”/118mm flange or larger required Thermocouple Type Optional 4.625”/ 118mm flange or larger required Optional 4.5”/ 114mm flange or larger required Optional 4.625”/ 118mm flange or larger required Maximum NH3 Partial Pressure Filament Material Optional 4.5”/114mm flange or larger required Optional 4.5”/ 114mm flange...