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5cc Dual Dopant Source

5cc Dual Dopant Source

5cc Dual Dopant Source

Product catalog summary
Overview: Veeco's 5cc Dual Dopant Source is an advanced tool designed for providing dopant fluxes with increased capacity and efficiency. It is tailored for systems with limited source ports and offers significant improvements over previous models.
Specifications:
  • Capacity: The new model has a capacity more than three times that of the original 1.5cc dual dopant source, featuring two 5cc conical crucibles.
  • Shutters: Independent shutters for each crucible allow for maximum flexibility in dopant configurations.
  • Cooling: Both source heads are water-cooled, enhancing thermal management.
  • Mounting Flange: 4.5" ConFlat Mounting Flange is used for installation.
  • Thermocouples: Equipped with two patented Type C band thermocouples, with an optional Type K for low temperatures.
  • Operating Temperatures: Typical operating temperatures range from 750-1350ºC, with a maximum outgassing temperature of 1600ºC.
  • Power Supply: Utilizes two DC power modules for operation.
Performance: The source is designed for efficient operation with rapid thermal response and excellent flux uniformity. It operates efficiently at high evaporation temperatures required for most dopant materials, minimizing thermal load on the MBE growth chamber.
Applications: Suitable for use with Si, Be, and other medium to high vapor pressure dopants. It is compatible with all Veeco R&D systems, with inquiries for use with other systems directed to Veeco.
Contact Information: For more details, visit Veeco's website or contact their MBE Operations in St. Paul, MN.
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Catalog excerpts

5cc Dual Dopant Source-1

Greater capacity and more capability from Veeco. 5cc Dual Dopant Source Industry’s largest capacity R&D dual dopant source with full thermal isolation > Tailored for the task of providing dopant fluxes > Extremely efficient heating > Ideal for systems with limited source ports > 3x the dopant material capacity as previous model > Independent shutters and complete thermal isolation allow for maximum flexibility of dopant configurations > Highly reproducible and reliable > 4.5" ConFlat Mounting

 Open the catalog to page 1
5cc Dual Dopant Source-2

Veeco’s 5cc Dual Dopant Source expands upon the Source is designed for efficient operation, rapid thermal response, and excellent flux uniformity. The source operates design of the original 1.5cc dual dopant source by increasing the capacity more than 3x and adding the ability to independently efficiently at the relatively high evaporation temperatures required for most dopant materials, without excessive thermal actuate the shutters on each crucible. load on the surrounding MBE growth chamber. As with Veeco’s previous dopant sources, the 5cc Dual Dopant 1.5cc Dual Dopant Specification New 5cc Dual...

 Open the catalog to page 2
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