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Transfer valve

Product catalog summary

Overview: This document provides technical specifications and options for the VAT Vakuumventile AG MONOVAT Series 02/03 valves, designed for SEMI applications handling 200, 300, and 450 mm wafers. These valves are used for load lock and process module isolation, offering virtually particle and vibration-free operation with over 5 million cycles between maintenance.

Specifications:

Valve Series 022: Double acting pneumatic actuator with position indicator, available in aluminum or stainless steel. Sizes range from 32 x 222 mm to 56 x 496 mm.
Valve Series 032: Similar specifications to Series 022, with additional insert options.
Materials: Valve body and gate available in aluminum EN AW-6082 or stainless steel AISI 316L. Sealing materials include FKM (VITON) and FFKM.
Leak Rate: Varies by material and seal type, with metal seals offering the lowest leak rates.
Pressure and Temperature: Operating pressure ranges from 1 · 10-9 mbar to 1.2 bar, with temperature limits up to 200°C depending on materials.

Features:

Compact design with a modular system allowing the same actuator for different valve sizes.
Maintenance-free actuator with a self-adjusting gate.
Automatic leak rate supervision and differential pressure management.

Options and Accessories:

Various opening sizes and sealing materials available on request.
Surface treatments include hard anodizing and nickel plating.
Temperature management options such as liquid cooling and heating cartridges.
High-speed closing and pneumatic locking features.
Customizable sensor systems for pressure, temperature, and wafer detection.

Applications: These valves are suitable for semiconductor manufacturing environments requiring high precision and reliability, with easy maintenance and long service life.

Catalog excerpts

Transfer valve/insert MONOVAT For SEMI applications handling For load lock / process module isolation Virtually particle and vibration-free >5 million cycles between maintenance Very easy maintenance thanks to self-adjusting plate Body material aluminum or stainless steel double acting pneumatic actuator with position indicator double acting pneumatic actuator SEMI E21-94 with position indicator SEMI E21-94 with solenoid for impulse actuation: 022 . . -. . 44 (specify control voltage) Other opening sizes: see «Options» with solenoid for impulse actuation: 032 . . -. . 44 (specify control voltage) Other opening sizes and insert types: see «Options»

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Sealing materials Gate: FKM (VITON, vulcanized) Bonnet flange: FKM (VITON, O-ring) Body flange (seat side): Feedth rough Bellows feedthrough (welded bellows) inside, protected 3 vulcanized gate seal 4 bonnet flange seal 6 body flange seal 7 body flange sealing V valve seat side Compact design Modular system, same actuator for different valve sizes Maintenance-free actuator, self-adjusting gate without detached mounting parts V valve seat side V valve seat side Opening on rear side larger than on seat Same size of opening on seat side and side rear side With bonnet flange Gate service through...

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Transfer valve/insert MONOVAT Technical data Leak rate1) at body and at seat in mbar Is-1 At room temperature (25°C) and under clean environmental conditions. Maximum values: depending on operating conditions and sealing materials In order to maximize the life time of the gate; the operating pressure should be kept as low as possible, however high enough to ensure the required leak rate in the closed valve position. Depending on the length of the sealing line (size of gate), tolerances of the sealing lip, accuracy of the measurement and required leak rate, the ope- rating pressure settings may...

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Valve body: • Opening sizes: - Other opening sizes on request, max. 56 x 700 mm • Body flange: - Sealing surface or groove with O-ring - Sealing materials (O-ring): FKM, FFKM - Metal seal (for stainless steel) - Other sealing materials on request - Bolt pattern outside or inside of the sealing line - Alignment pins, alignment holes • Surface treatment: -Aluminum: hard anodized or nickel-plated - Aluminum / stainless steel: ball-polished - Sealing surfaces for metal flange seal - Metal seal on bonnet flange - Bellows assembly welded to bonnet flange • Temperature management: - Valve body prepared...

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