Transfer valve MONOVAT direct

Product catalog summary

Overview: This document provides technical specifications and options for the VAT Vakuumventile AG MONOVAT Series 02/03 valves, designed for SEMI applications handling 200, 300, and 450 mm wafers. These valves are used for load lock and process module isolation, offering virtually particle and vibration-free operation with over 5 million cycles between maintenance.

Specifications:

Valve Series 022: Double acting pneumatic actuator with position indicator, available in aluminum or stainless steel. Various sizes are available, with ordering numbers provided for different configurations.
Valve Series 032: Similar to Series 022, with specific ordering numbers for aluminum and stainless steel types.
Sealing Materials: FKM (VITON) for gate and bonnet flange seals, with options for FFKM and metal seals.
Technical Data: Leak rates, pressure ranges, and temperature limits are specified, with different materials offering varying performance characteristics.

Procedures:

Easy maintenance is facilitated by a self-adjusting plate and modular system design, allowing for gate service through the bonnet flange.
Gate exchange involves dismounting the actuator/gate and removing gate screws with an Allen wrench.

Options and Accessories:

Various opening sizes and sealing materials are available, with options for surface treatment and temperature management.
Actuator and pneumatics options include pneumatic locking, high-speed venting, and solenoid for impulse actuation.
Position indicators and feedthrough options are also detailed, with specific configurations for different applications.

Dimensions: Detailed dimensions for both Valve Series 022 and Insert Series 032 are provided, including measurements for various components and configurations.

Catalog excerpts

Transfer valve / insert MONOVAT For SEMI applications handling 200, 300 and 450 mm wafers For load lock / process module isolation Virtually particle and vibration-free > 5 million cycles between maintenance Very easy maintenance thanks to self-adjusting plate Body material aluminum or stainless steel Ordering numbers type B double acting pneumatic actuator with position indicator opening: rear side > seat side opening: rear side = seat side with bonnet flange with bonnet flange stainless steel stainless steel with solenoid for impulse actuation: 022 . . - . . 44 (specify control voltage) Other opening sizes: see «Options» Insert Series 032 double acting pneumatic actuator with position indicator Ordering numbers type C inch aluminum stainless steel with solenoid for impulse actuation: 032 . . - . . 44 (specify control voltage) Other opening sizes and insert types: see «Options»

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Series 02/03 Sealing materials Gate: FKM (VITON, vulcanized) Bonnet flange: FKM (VITON, O-ring) 1 2 3 4 5 6 valve body MONOVAT gate vulcanized gate seal bonnet flange seal bellows feedthrough body flange seal side A 7 body flange sealing surface side B valve seat side Body flange (seat side): FKM (VITON, O-ring) Feedthrough Bellows feedthrough (welded bellows) inside, protected Compact design Modular system, same actuator for different valve sizes Maintenance-free actuator, self-adjusting gate without detached mounting parts Types Valve valve seat side valve seat side Opening on rear side larger...

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Transfer valve / insert MONOVAT Technical data Leak rate 1) at body and at seat in mbar Is-1 FKM seal sealing surface FFKM seal metal seal aluminum: hard anodized aluminum: nickel-plated < 5 · 10 -10 (stainless steel only) metal blank (milled / ball polished) Measuring conditions: Body: 30s, He conc. ≥ 20% Seat: 15s, He conc. ≥ 30% Automatic leak rate supervision dp = 1 bar Pressure range - Metal blank or nickel-plated - Aluminum, hard anodized - Metal seal 1 · 10 -9 mbar to 1.2 bar (abs) 1 · 10 -6 mbar to 1.2 bar (abs) 5 · 10 -10 mbar to 1.2 bar (abs) Differential pressure on the gate Differential...

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Series 02/03 Options Valve body: Body flange: - Sealing surface or groove with O-ring - Sealing materials (O-ring): FKM, FFKM - Metal seal (for stainless steel) - Other sealing materials on request - Bolt pattern outside or inside of the sealing line - Alignment pins, alignment holes • Surface treatment: - Aluminum: hard anodized or nickel-plated - Aluminum / stainless steel: ball-polished • UHV version: - Sealing surfaces for metal flange seal - Metal seal on bonnet flange - Bellows assembly welded to bonnet flange • Temperature management: - Valve body prepared for: liquid cooling (stainless...

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Transfer valve / insert MONOVAT Dimensions: Valve Series 022 Valve seat side Rear side: type B Rear side: type A a valve seat side g required for dismantling c electrical connection f position indicator

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