with extended control range Downstream pressure control and isolation valve Compact design Fast, virtually particle-free and shock-free operation High-performance, integrated controller Low minimum controllable conductance Body material aluminum Valve with integrated controller Ordering numbers aluminum aluminum hard anodized optional controller configurations SPS = ± 15V DC Sensor Power Supply PFO = Power Failure Option (valve closes or opens automatically at power failure) basic version with SPS with PFO with SPS and PFO Interface RS232, 1 sensor RS232, 2 sensors Logic, 1 sensor Logic, 2 sensors DeviceNet ®, 1 sensor DeviceNet ®, 2 sensors Ordering number example: 65140-PAGG = aluminum valve with ISO-F DN 100 flanges, RS232 interface, for 1 sensor 'VAT Control View' package, consisting of software and service cable 'VAT Control Performance Analyzer' package, consisting of software and service cable Connector kit for valves with RS232 or Logic interface, consisting of counter plugs for INTERFACE, SENSOR and POWER connections Connector kit for valves with DeviceNet ®, consisting of counter plugs for SENSOR and POWER connections AC power supply unit (input: 100 - 240 V AC, output: 24 V DC) Separation unit for controller including 2 m cable VAT Vakuumventile AG, CH-9469 Haag, Switzerland

Pendulum valve control system Sealing materials Plate: Body: Bonnet: VITON Rotary feedthrough (actuator) VITON 1 pendulum plate 1a conductance reduction ring (series 651 only) 2 sealing ring 3a plate seal 3b body seal 4 bonnet seal 5 actuator shaft 6 actuator 7 controller a valve seat side Shaft feedthrough (sealing ring) VITON 7 g stroke (series 651 only) Fast operation Position indication Easy maintenance The valve plate acts as a throttling element and varies the conductance of the valve opening. The integrated controller calculates the required plate position to achieve the setpoint pressure....

Series 65 Comparison Series 650 / Series 651 Control range Minimum controllable conductance Pressure rise time (up to setpoint) VAT has a software «Valve Evaluation Tool» to determine the most suitable product for a specific application. Please contact us to assist you when selecting a product. *) approx. upper pressure limit (depending on pump size, pump type and customer system) Control range pressure (mbar) Technical data Power consumption + 24 V DC (±10%) 50 W max. (controller + motor) 10 W max. for Power Failure Option 36 W max. for Sensor Power Supply Sensor supply Sensor input - Signal...

Pendulum valve control system Technical data Pressure range at 20°C - blank - hard anodized Leak rate to the outside at 20°C - blank - hard anodized Leak rate at the seat at 20°C - blank - hard anodized Valve unit Cycles until first service - Closing cycles (open - closed - open) - Throttling cycles (open - max. throttling - open) Material in vacuum - Valve body - Pendulum plate Series 650 - Pendulum plate Series 651 - Other parts Maximum values: depending on operating conditions and sealing materials throttling only weight (approx.) max. pressure during operation compressed air pressure min....

Series 65 Pressure controller Features - Fast and accurate pressure control - Automatic learning of system parameters - Hold function for plasma ignition - Valve position control - Remote control - Information display - Inputs for 1 or 2 linear pressure sensors (capacitance manometers) DeviceNet ® Pressure control - Closing or opening of the valve at power failure (option) The controller ensures fast and accurate pressure control. By operating the LEARN function — needs to be done only once at start-up — the system parameters are automatically determined. Due to the adaptive algorithm the controller...

Pendulum valve control system Easy maintenance - Valve need not be removed from the system for maintenance - Fast removal and reinstallation of pendulum plate and sealing ring for cleaning - Only 2 standard tools are necessary for maintenance Certain options are not available for some nominal diameters or cannot be combined. Moreover, options can affect the general technical data. Actuator / controller: - Actuator B2 (picture 1) - Controller with configurable PI parameters - RS232 interface with 2 analog outputs - Ethernet interface Valve: - Other sizes (e. g. DN 80) - Other flange types (e....

Series 65 Main dimensions mm 100 4 insulation for heated valves connection box for heated valves Power input Sensor input / Sensor power supply Micro-style male Flange dimensions V1*) inch 12.13 V2*) inch W inch *) g required for dismantling b compr. air connection a valve seat c electrical connection f position indicator side mm 100 4