Main applications For pumping and venting of HV systems when maximum conductance is important For harsh process environments (high resistance to corrosion and fluor) Series 25.0 Angle valve Series 25.1 Inline valve Ordering information Series 25.0 Angle valve with pneumatic actuator double acting Ordering numbers ISO-KF with position indicator Series 25.1 Inline valve with pneumatic actuator double acting without position indicator Ordering numbers ISO-KF without position indicator with position indicator Series 25.2 3/2-way valve with pneumatic actuator double acting Ordering numbers ISO-KF «claw» without position indicator with position indicator

Functional principle Body material: aluminum Parts in contact with vacuum: aluminum Angle, inline and 3/2-way versions Rotary feedthrough Maximum conductance Protected gate seal Resistant against differential pressure Mechanically locked in open and closed position Low particle count 1 Gate seal 2 Bonnet seal 3 Feedthrough seal Valve seat side Function The cylinder-shaped gate performs a tilt-turn-tilt movement. This prevents the gate seal from sliding on the valve seat. Valve closed Tilt movement of gate. Gate seal lifts off from valve seat. Angle valve 90° turn of gate towards the open position....

HV cylinder valve Technical data Series 25 Leak rate: valve body, valve seat Pressure range Differential pressure on the gate – In opening direction – In closing direction Differential pressure at opening Cycles until first service Temperature – Valve body – Actuator – Position indicator Material – Valve body – Gate, bonnet flange – Shaft – Gate fastening screw, washer A4-80 with Ni-PTFE coating Seal: bonnet, gate, feedthrough rotary feedthrough Mounting position Valve position indication Conductance (molecular flow) ISO-KF «claw» ISO-KF «claw» Valves with position indicator Closing or opening...

Actuator – One-touch fitting for pneumatic tube Valve – Other sealing materials, e. g. FFKM – Valve DN 40 with flange ISO-KF DN 50 «claw» – Stainless steel version – Heating cartridge for DN 40 Ordering information for options: Ordering No. of valve-X (e. g. 25032-KA14-X, X = one-touch fitting for 4 mm pneumatic tube) Flange ISO-KF «claw» Dimensions Series 25.0 Angle valve with pneumatic actuator DN 16 – 40 (⅝" – 1½")  ISO-KF Series 25.1 Inline valve with pneumatic actuator DN 16 – 40 (⅝" – 1½")  ISO-KF Series 25.2 3/2-way valve with pneumatic actuator DN 16 – 40 (⅝" – 1½")  ISO-KF «claw» mm...