Butterfly valve control system Series 61.2 Main applications Downstream pressure control valve for SEMI, FPD, PV, SOLAR and industrial processes Optimal for fast and demanding processes, e. g. CVD Ordering information Valve with stepper motor and integrated pressure controller Ordering numbers aluminum stainless steel ISO-F Controller configurations: basic version with SPS with PFO with SPS and PFO basic version with VC master with SPS and VC master with PFO and VC master with SPS, PFO and VC master SPS = Sensor Power Supply (±15 V DC power supply for sensor) PFO = Power Failure Option (valve closes / opens automatically at power failure) VC = Valve Cluster (for operating several valves synchronously) Example: 61240-PAGG = Aluminum valve with ISO-F DN 100 flanges, RS232 interface, for 1 sensor G = RS232 1 H = RS232 2 C = Logic 1 E = Logic 2 P = DeviceNet ® 1 Q = DeviceNet ® 2 D = Profibus 1 F = Profibus 2 J = RS485 1 K = RS485 2 Y = Ethernet 1 Z = Ethernet 2 L = CC-Link 1 N = CC-Link 2 I = EtherCAT 1 X = EtherCAT 2 S = VC slave (without interface) Pressure controller: see pages 146 – 149

Functional principle Body material: aluminum or stainless steel Compact design Fast operation Double seal of rotary feedthrough Integrated pressure controller Extremely short control response times Automatic service signal (contamination) Position indication Service port for connecting a computer or a service box 2 Excellent resistance to contaminating processes 1 Controller 2 Coupling 3 Bearing Easy maintenance 4 Double seal 5 Plate 6 Valve body The plate acts as a throttling element and varies the conductance of the valve opening. The pressure controller calculates the required plate position...

Butterfly valve control system Stainless steel valve Aluminum valve Minimum controllable conductance (molecular flow) ls-1 Typical closing or opening time Conductance (molecular flow) ls-1 Max. differential pressure on the plate Continued Technical data Technical data for pressure controller: see pages 146 – 149 Options Certain options are not available for some nominal diameters or cannot be combined. Moreover, options can affect the general technical data. Actuator – Ultra fast actuator (0.1 s) – Output for control of isolation valve – Controller with configurable PID parameters (adaptive,...

Series 61 Dimensions Valve with stepper motor and integrated pressure controller  DN 25 – 50 (1" – 2") ISO-KF Valve with stepper motor and integrated pressure controller  DN 63 – 250 (2½" – 10") ISO-F E × F inch

Pressure controllers for valves Series 61.2 Features Integrated or external pressure controller, depending on valve type Automatic learning of system parameters Extremely short control response times Fast and accurate pressure control Valve position control Remote control or local operation Input for pressure sensor Information display By operating the LEARN function – needs to be done only once at start-up – the system parameters are automatically determined. Due to the adaptive algorithm the controller continuously adapts to the process conditions (species of gas, gas flow) and thus ensures...

Remote control via computer Control via computer by using the CPA software developed by VAT offers comfortable functions such as - Graphical illustration ofthe pressure behavior - Programming and recording of sequences - Several possibilities for data analysis and process optimization Cycle Counter Power Fail Status Sealing Status Pressure Control Learn Parameter Chart Analyzer Firmware Download Operating Manual Record '| 00:00:00.00 | Pause *|| Ctear |f Analyze COM1-384007E-1 connected valve G1238 PACH AKB1/0001 The software -Control Performance Analyzer (CPA)- may be downloaded for free from...

Pressure controllers for valves Integrated controller: Series 61.2 Available interfaces: – Logic – RS232 – RS485 – DeviceNet ® – Ethernet – Profibus – CC-Link – EtherCAT Example: RS232 Power consumption – Controller + motor – Power failure option (PFO) – Sensor power supply (SPS) Sensor supply Sensor input – Signal voltage – Input resistance – Resolution – Sampling rate 0 – 10 V DC linear with pressure Ri = 100 kΩ 0.23 mV 10 ms Control accuracy Position resolution ≥ 20 000 (depending on valve type) The higher value applies